Flexible Point-Spread Function Illumination Simulator
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Solution Overview
Problem
Current methods for simulating illumination pupils in optical lithographic projection systems lack flexibility and accuracy, particularly in systems with adjustable components like the axicon or zoom lens, which affect light distribution, and require significant computational resources or redesign for each new pupil shape.
Innovation Solution
A method that identifies adjustable components affecting light distribution in the illumination pupil and uses a point spread function to predict and simulate this distribution, incorporating configurable settings of the illumination system, such as the axicon pair and zoom lens, to generate accurate and flexible illumination patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a raytraceable model is used to simulate light propagation, then accuracy and realism of pupil patterns is improved, but CPU time and computational resources are significantly increased
Solution Approach 1:
The patent creates a simplified computational copy of the raytraceable model by deriving analytical expressions that replicate the light propagation behavior. Instead of tracing individual rays through the complete optical system, the invention uses closed-form mathematical models that copy the essential optical characteristics, achieving comparable accuracy with dramatically reduced computational effort.
Solution Approach 2:
The patent transforms the complex raytraceable model into parametric expressions by identifying and modeling the key parameters that govern light distribution. By changing the representation from geometric ray tracing to parameter-based analytical expressions, the system maintains accuracy while enabling rapid evaluation of different illumination configurations.
2Productivity
If parametric models of standard illumination pupil shapes are used, then computational speed is improved, but flexibility for free-form illumination is reduced
Solution Approach 1:
The patent introduces dynamic adaptability by creating parametric models that can be configured for different illumination patterns. The analytical expressions include adjustable parameters that allow the same computational framework to adapt to various pupil shapes and configurations, providing both speed and flexibility simultaneously.
Solution Approach 2:
The patent develops a universal computational framework that can handle multiple illumination patterns and configurations through a single set of analytical expressions. The parametric models are designed to be multi-functional, accommodating standard patterns as well as free-form illuminations without requiring separate models for each case.
3Measurement precision
If parametric models are redesigned for each new illumination pupil shape, then accuracy is maintained, but device complexity and redesign effort are increased
Solution Approach 1:
The patent creates a universal parametric modeling framework that can accurately simulate different illumination pupil shapes without requiring separate models. The analytical expressions are designed to accommodate various configurations through parameter adjustment, eliminating the need for redesign while maintaining accuracy across different illumination patterns.
Data Source
AI summary
Method of predicting a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.