Flexible Retention Ring for Uniform Workpiece Sealing
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Solution Overview
Problem
Existing fluid processing systems for workpieces, such as semiconductor wafers and printed circuit boards, face challenges in achieving uniform film deposition due to non-uniform fluid distribution, air bubble entrapment, and insecure workpiece retention, leading to variations in film thickness and deposition quality.
Innovation Solution
A system utilizing a flexible member and ring configuration to securely retain workpieces with a fluid-tight seal, ensuring consistent positioning and uniform force application, which includes a backing member with push pins and an inflatable bladder to flex the member and form a barrier against fluid entry, and a modular architecture for optimized fluid processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a workpiece is retained using conventional methods, then the workpiece can be held in position, but the position may change during processing and fluid can leak into unwanted areas
Solution Approach 1:
A flexible sealing ring acts as an intermediary element between the workpiece and the processing environment. The ring includes a flexible member that forms a fluid-tight seal, preventing fluid leakage while maintaining workpiece position. This intermediary component isolates the workpiece from harmful fluid exposure without compromising retention security.
2Manufacturing precision
If fluid distribution is not uniform at the cathode surface, then the system is simpler to operate, but the diffusion boundary layer varies across the workpiece surface leading to non-uniform film thickness
Solution Approach 1:
The system implements local quality by creating a controlled fluid distribution environment specifically at the cathode surface. The flexible sealing ring confines fluid flow to ensure uniform distribution across the workpiece surface, while the workpiece holder provides precise positioning. This localized control of fluid dynamics ensures uniform diffusion boundary layer thickness and consistent film deposition without requiring complex system-wide fluid management.
3Manufacturing precision
If the workpiece position is not precisely controlled, then the system setup is simpler, but the film deposition becomes non-uniform due to position changes during processing
Solution Approach 1:
The workpiece holder is designed to pre-position the workpiece in the optimal location before processing begins. The holder includes features that securely clamp and align the workpiece, ensuring precise positioning is established in advance. This preliminary positioning action maintains consistent film deposition throughout processing without requiring complex real-time position adjustment mechanisms during operation.
4Manufacturing precision
If fluid mixing is inefficient near the deposition surface, then the system requires less energy input, but air or gas bubbles become entrapped at the surface inhibiting further deposition
Solution Approach 1:
The flexible sealing ring performs a preliminary anti-action by preventing gas bubbles from reaching and adhering to the workpiece surface in the first place. The seal creates a controlled environment that excludes gas entrainment before it can interfere with deposition. This preventive approach maintains uniform deposition without requiring high-energy fluid mixing to dislodge or remove bubbles during processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures uniform film deposition, reduces air bubble entrapment, and enhances productivity by maintaining a secure seal during processing, leading to higher throughput and reduced costs.
Implementation Method 1
A flexible member can be used to provide a substantially uniform force to securely retain the workpiece
Implementation Method 2
an inflatable bladder to flex the member and form a barrier against fluid entry
Data Source
AI summary
A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.