Flexible Seal Substrate Holder for Warp Absorption
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Solution Overview
Problem
Conventional substrate holding mechanisms struggle to effectively absorb and hold substrates with warps, often requiring complex configurations and risking damage during warp correction.
Innovation Solution
A substrate processing apparatus featuring a substrate holder with a plate-like base, a suction port, a supporter that protrudes upward to support the substrate, and a flexible seal that bends to absorb the substrate, allowing it to be held securely even with warps, using a ring-shaped plate member and conductive materials for enhanced stability and releasability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate holding mechanism is used, then the structure is simple, but it cannot effectively hold substrates with warps
Solution Approach 1:
The seal is designed to be flexible rather than rigid, allowing it to dynamically adapt its shape to match the substrate surface. The seal includes a base portion and a protruding portion that can elastically deform to conform to warped substrates, enabling reliable holding without complex correction mechanisms
Solution Approach 2:
The seal's physical parameters are optimized by making it flexible with specific elastic properties. The protruding portion's height and flexibility are carefully designed to allow the seal to bend and adapt to substrate warps while maintaining effective contact and suction capability
2Reliability
If a warp correction mechanism is introduced, then substrate holding reliability improves, but the device structure becomes complicated
Solution Approach 1:
The invention extracts the warp correction function from a separate mechanical mechanism and integrates it into the seal's elastic deformation capability. Instead of adding a complex correction device, the seal itself performs the adaptation function through its flexible design, eliminating the need for additional correction mechanisms
Solution Approach 2:
The seal serves multiple functions simultaneously: it provides the suction seal, adapts to substrate warps, and supports the substrate during holding. This multi-functionality eliminates the need for separate warp correction mechanisms, maintaining structural simplicity while improving holding reliability
3Reliability
If strong suction is applied to correct large warps, then holding reliability improves, but the substrate may be damaged
Solution Approach 1:
The flexible seal acts as a cushioning element that gradually adapts to the substrate surface during the suction process. Instead of applying strong suction force to a rigid surface, the seal's elastic deformation provides a cushioning effect that prevents sudden or excessive forces that could damage the substrate
4Adaptability or versatility
If a rigid seal is used, then the structure is simple, but it cannot adapt to warped substrates
Solution Approach 1:
The seal is designed as a flexible structure with a base portion and a protruding portion that can elastically deform. This flexible design allows the seal to adapt to substrate warps by bending and conforming to the surface, providing versatility without requiring complex adjustable mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus securely holds substrates with warps without damaging them, maintaining stability and preventing misalignment during rotation and processing, while simplifying the holding mechanism and reducing the risk of detachment.
Implementation Method 1
an absorber configured to suck gas present between the substrate holder and the substrate to allow the substrate holder to adsorb the substrate
Implementation Method 2
a flexible seal that is disposed around an entire periphery of the supporter and has an upper edge portion located above the supporter. When the substrate holder adsorbs the substrate, the gas present between the base and the substrate is sucked through the suction port with the upper edge portion of the seal being in contact with the lower surface of the substrate, to allow the substrate to approach the base and come in contact with the supporter while making the seal bend down
Data Source
AI summary
A plate-like base of a substrate holder has an upper surface perpendicular to a central axis. A supporter is disposed circumferentially around the central part of the base and protrudes upward from the upper surface of the base to support the lower surface of a substrate. A flexible seal is disposed around the entire periphery of the supporter. An upper edge portion of the seal is located above the supporter. When the substrate holder adsorbs a substrate, gas present between the base and the substrate is sucked through a suction port with the upper edge portion of the seal being in contact with the lower surface of the substrate. This allows the substrate to approach the base and come in contact with the supporter while making the seal bend down. As a result, even if there is a warp in a substrate, the substrate can be held suitably.