Flexible Sealing Apparatus for Vacuum Process Chamber Misalignment
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Solution Overview
Problem
In vacuum process chambers, fragile components like quartz bell jars often require gentle sealing due to their fragility, leading to misalignment and leaks caused by manufacturing and assembly tolerances, especially when large sealing surfaces are involved, as excessive pressure can damage these components.
Innovation Solution
A sealing apparatus with an annular body and a radially extending second portion, designed to be retained in a recess and provide a force to form a seal between surfaces, compensating for misalignment and non-uniformities by using a flexible material and a configuration that allows for uniform force distribution across a wide range of motion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If large forces are applied to the seal to prevent leaks, then sealing reliability is improved, but fragile components may be damaged
Solution Approach 1:
The patent employs a flexible seal member with a specific cross-sectional geometry (rounded first portion and flattened second portion) that allows the seal to deform and conform to surface irregularities. This flexibility enables the seal to maintain contact and prevent leaks without requiring excessive compressive forces that would damage fragile components like quartz bell jars.
Solution Approach 2:
The patent changes the physical parameters of the sealing system by modifying the seal's cross-sectional shape and introducing a compliant layer between rigid surfaces. This allows the system to achieve effective sealing at lower pressure conditions, transforming the sealing mechanism from rigid force-based contact to flexible deformation-based contact.
2Reliability
If greater pressure is applied to the seal to compensate for misalignment, then sealing effectiveness is improved, but fragile components may be damaged
Solution Approach 1:
The flexible seal member can deform to accommodate misalignments and surface non-uniformities, maintaining effective sealing contact without requiring increased compressive pressure. The compliant nature of the seal allows it to bridge gaps and conform to irregular surfaces that would otherwise require higher forces to seal.
Solution Approach 2:
The seal is designed with dynamic compliance, allowing it to adapt its shape and distribution of contact pressure in response to misalignments. Rather than requiring rigid high-force contact, the seal dynamically conforms to the mating surfaces, distributing sealing forces more evenly and reducing peak stresses on fragile components.
3Manufacturing precision
If precise manufacturing and assembly tolerances are maintained, then misalignment is reduced, but manufacturing complexity and cost increase
Solution Approach 1:
The patent introduces a compliant layer and modifies the seal geometry to change the physical parameters of the sealing interface. This allows the system to tolerate wider manufacturing and assembly tolerances while maintaining effective sealing, reducing the need for precision machining and tight tolerance specifications on mating surfaces.
Solution Approach 2:
The flexible seal acts as an intermediary element between rigid mating surfaces, absorbing and compensating for misalignments and surface irregularities. This intermediary component enables effective sealing even when direct rigid contact would require precise alignment, thereby simplifying manufacturing and assembly requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sealing apparatus effectively improves tolerance to misalignment and non-uniformities between sealing surfaces, ensuring a reliable seal in vacuum process chambers and preventing leaks, even in applications where large forces cannot be applied, thus maintaining process pressures and containing toxic gases effectively.
Implementation Method 1
designed to be retained in a recess and provide a force to form a seal between surfaces, compensating for misalignment and non-uniformities by using a flexible material
Data Source
AI summary
A sealing apparatus is provided herein. In some embodiments, the sealing apparatus includes an annular body including a first portion having a circular cross-section and a second portion extending radially outward from the first portion, wherein the second portion has a rectangular cross-section. In some embodiments, a sealing apparatus includes a body configured to be retained in a recess of a first surface; an arm extending from the body away from the first surface and configured to provide a force when deflected towards the body by a second surface to form a seal between the first surface and the second surface.