Flexible Stamp Actuation for Vibration-Free Microcontact Printing
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Solution Overview
Problem
Existing microcontact printing methods face challenges in achieving high accuracy due to vibrations introduced by switching valves from vacuum to overpressure, leading to distortions in the transferred pattern, especially when higher accuracy is required for features in the nanometre range.
Innovation Solution
A method and device that utilize an actuation unit with actuating means to move portions of the stamping surface towards the receiving surface in a continuous, uninterrupted manner, avoiding vibrations by controlling the movement of the actuation unit and the stamping surface with respect to each other, allowing for precise control of the transfer time and pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If valves are switched from vacuum to overpressure to move stamp portions toward the substrate, then the stamp portions can be actuated to transfer the pattern, but vibrations are introduced that cause distortions in the transferred pattern
Solution Approach 1:
The patent replaces the mechanical valve switching system with an acoustic radiation pressure system. Acoustic waves generated by a transducer create radiation pressure that acts on the stamp portions, eliminating the need for mechanical valve switching and the associated vibrations. This substitution of mechanical actuation with acoustic field-based actuation resolves the contradiction by providing vibration-free movement of stamp portions.
Solution Approach 2:
The patent changes the physical parameters of the actuation system by using acoustic radiation pressure instead of mechanical pressure differential. By controlling the acoustic field parameters (frequency, amplitude, phase), the system achieves precise control over stamp portion movement without introducing vibrations that would compromise pattern transfer accuracy.
2Productivity
If individual actuators are used to move portions of the stamp successively, then transfer areas can be created and moved like a wave, but vibrations are introduced when higher accuracy is required
Solution Approach 1:
The patent employs periodic acoustic waves to create radiation pressure that acts on the stamp portions. By controlling the periodicity and phase of the acoustic waves, the system achieves successive actuation of different stamp portions in a wave-like manner, maintaining high productivity while eliminating vibrations through the continuous, smooth nature of acoustic field modulation.
Solution Approach 2:
The patent replaces the mechanical actuator system with an acoustic radiation pressure system. This substitution eliminates the vibrations inherent in mechanical actuation while maintaining the ability to successively activate different regions of the stamp, thereby preserving productivity without sacrificing the nanometre-level precision required for high-accuracy applications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate pattern transfer without vibrations, ensuring high precision even for features in the nanometre range, by maintaining continuous movement and controlled pressure, thus improving the accuracy and reliability of the microcontact printing process.
Implementation Method 1
actuation unit with actuating means for moving a portion of a flexible one of the stamping surface and the receiving surface in a direction toward another of the stamping surface and the receiving surface
Data Source
Figure 1~2
Figure 3
AI summary
A device (1) for transferring a pattern (12) from a stamp (10) to a substrate (20) comprises a table (22) for supporting a substrate (20), a flexible stamp (10) and a movably arranged body (25) having a pressure chamber (27) for exerting pressure on a portion of the stamp (10), so that the portion is pushed toward the substrate (20) and contacts the substrate (20). During a pattern transferring process, the body (25) is moved. As a result, adjacent portions of the stamp (10) successively go through a process of being pushed toward the substrate (20), getting in contact with the substrate (20), and being allowed to move back in place again. In this way, it is achieved that the pattern (12) of the stamp (10) is transferred to the substrate (20), without the introduction of vibrations, so that the transfer of the pattern (12) takes place in a highly accurate fashion.