Flexible Standoff for Lamphead PCB Alignment
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Solution Overview
Problem
Current epi systems in semiconductor production face increased costs due to the need for multiple lamp assembly lengths to properly position lamp bulbs, requiring separate manufacturing processes and larger stock holdings for replacements.
Innovation Solution
The implementation of flexible standoffs in RTP chambers allows for a generic lamp assembly design with uniform lamp base length, reducing costs by eliminating the need for multiple replacement sizes and providing self-alignment and additional clearance for the lamp assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple lamp assembly lengths are used to properly position lamp bulbs in the lamphead, then the lamp bulbs can be positioned correctly, but the manufacturing complexity and inventory requirements increase
Solution Approach 1:
The patent changes the physical state of the standoff from rigid to flexible, allowing a single uniform lamp base length to adapt to different positions. The flexible material enables the standoff to bend and conform to various angles and lengths, eliminating the need for multiple fixed-length standoffs while maintaining precise lamp bulb positioning.
Solution Approach 2:
The flexible standoff serves multiple functions that previously required different components. A single flexible standoff design can accommodate various positions, angles, and lengths, making it a universal component that replaces multiple specialized standoffs, thereby reducing manufacturing complexity and inventory requirements.
2Manufacturing precision
If multiple lamp assembly lengths are used to properly position lamp bulbs, then the lamp bulbs can be positioned correctly, but the stock required on hand for replacements increases
Solution Approach 1:
The flexible standoff is designed as a universal component that can be used in multiple positions and configurations. This means that facilities only need to maintain inventory of one type of flexible standoff instead of multiple fixed-length varieties, significantly reducing the quantity of replacement parts that must be kept in stock while still achieving correct lamp bulb positioning.
3Ease of manufacture
If a generic lamp assembly design with uniform lamp base length is used, then costs are reduced, but the ability to properly position lamp bulbs may be compromised
Solution Approach 1:
The patent employs parameter changes by transitioning from fixed rigid standoffs to flexible standoffs. This allows a single standardized lamp base length to achieve multiple positioning configurations through the flexible material's ability to bend and adapt, thereby maintaining manufacturing precision while simplifying the manufacturing process and reducing costs.
4Ease of manufacture
If flexible standoffs are used, then cost per replacement decreases, but the structural rigidity may be reduced
Solution Approach 1:
The patent directly applies the principle of flexible shells by using flexible material for the standoff component. This flexible standoff maintains sufficient structural integrity to hold the lamp bulb in position while allowing bending and adaptation to different angles, achieving both cost reduction through standardization and adequate mechanical strength for the application.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution decreases the cost per replacement and required stock on hand while maintaining efficient thermal connection and alignment, thereby reducing overall production costs and simplifying maintenance.
Implementation Method 1
maintaining efficient thermal connection
Implementation Method 2
an array of high-intensity incandescent lamps fit into a lamphead and directed at the substrate or wafer
Implementation Method 3
at least one radiation generating filament
Data Source
AI summary
The embodiments described herein generally relate to a flexible standoff for use with a lamphead assembly in a thermal processing chamber. In one embodiment, the lamphead assembly can include a lamphead with one or more fixed lamphead positions, a lamp bulb, a lamp base with a standoff contact adaptor and a flexible standoff capable of attaching and positioning the lamp assembly. The flexible standoff can include a socket configured to receive a lamp base of a lamp assembly, a housing configured to position a lamp bulb of a lamp assembly in thermal connection with a processing chamber, a contact adaptor configured to electrically connect to a power supply and a conductive material to electrically connect the socket and the contact adaptor.