Flexible Stopper MEMS Device Anchor Merging
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Solution Overview
Problem
Existing MEMS devices with stoppers face a trade-off between reliability and sensing performance, as additional stopping structures required to reduce signal offset effects due to particle generation during high-speed impacts, necessitate additional anchors that sacrifice proof mass area and sensing sensitivity.
Innovation Solution
The MEMS device incorporates a flexible stopper that provides an elastic buffering effect against inertial forces, preventing high-speed impacts with the hard stopper and reducing signal offset effects, while sharing an anchor with the main suspension to minimize the impact on the proof mass area and equivalent mass.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If additional stopping structures are added to reduce contact speed and eliminate signal offset effects, then reliability is improved, but additional anchors are required which sacrifice proof mass area and sensing sensitivity
Solution Approach 1:
The flexible stopper and main suspension share a common anchor structure, merging two functional components into a single anchor point. This integration eliminates the need for additional anchors that would otherwise be required, thereby preserving proof mass area and maintaining sensing sensitivity while still providing the elastic buffering effect to prevent high-speed impacts and signal offset
Solution Approach 2:
The stopper is designed with flexible material properties rather than being a rigid hard stopper. This parameter change in material flexibility allows the stopper to provide elastic buffering that reduces contact speed and prevents particle generation, while the flexible nature allows it to be integrated with the suspension system without requiring additional rigid anchor structures
2Object-affected harmful factors
If additional stopping structures are added to prevent high-speed impacts, then particle generation is reduced, but the device complexity increases due to additional anchors
Solution Approach 1:
By combining the anchor function of the main suspension with the anchor function of the flexible stopper, the design reduces the total number of anchors required. This merging approach maintains the elastic buffering capability to prevent high-speed impacts and particle generation while simplifying the overall device structure by eliminating redundant anchor points
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The flexible stopper effectively mitigates the impact of inertial forces on the proof mass, maintaining sensing sensitivity by reducing the need for additional anchors and preventing signal offset effects caused by particle generation.
Implementation Method 1
the flexible stopper provides an elastic buffering effect against inertial forces in at least one direction, effectively preventing the proof mass from high-speed impacts with the hard stopper
Data Source
AI summary
The present application discloses a MEMS device comprising a proof mass, an anchor, a main suspension, and a flexible stopper. The main suspension respectively connects to the proof mass and the anchor at both ends thereof. An end of the flexible stopper is connected to the anchor, and another end of the flexible stopper extends toward the proof mass. Thereby, the present application reduces the impact of adding the flexible stopper on the proof mass, maintaining the sensing sensitivity of the MEMS device.