Flexible Device Substrate via Debonding Layer and Metal Oxide Adhesive

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Solution Overview

Problem

The limitation of using glass substrates without flexibility in display device manufacturing restricts the versatility and application of display devices, as they cannot be easily curved or bent, necessitating the development of a method to create a flexible device substrate.

Innovation Solution

A method involving the formation of a debonding layer with a silane compound and an inorganic adhesive layer using metal oxide materials like Al2O3 and AlZnO on a carrier substrate, allowing for the separation and flexibility of a process substrate, which is then used to manufacture a display device with enhanced hydrophobic and hydrophilic properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a glass substrate is used for manufacturing display devices, then the structural strength and stability are improved, but the flexibility and adaptability of the display device are worsened

Engineering Contradiction:
Improvestructural strengthVSAvoidflexibility
Core Design Contradiction:
StrengthVSAdaptability or versatility

Solution Approach 1:

The patent replaces the rigid glass substrate with a flexible polymer substrate (such as polyimide, PET, or PEN) that can be bent and curved. This flexible substrate supports the entire display structure while enabling the device to achieve various shapes and form factors, directly resolving the contradiction between structural strength and flexibility.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent changes the fundamental material parameter of the substrate from inorganic glass to organic polymer materials. This material substitution fundamentally alters the mechanical properties, transitioning from rigid and brittle to flexible and ductile, thereby enabling both structural integrity and flexibility simultaneously.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If a flexible polymer substrate is used instead of glass, then the flexibility and adaptability are improved, but the manufacturing precision and reliability during separation processes are worsened

Engineering Contradiction:
ImproveflexibilityVSAvoidseparation precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies a release coating layer on the flexible substrate before manufacturing processes. This preliminary action creates a controlled interface that prevents unwanted adhesion during processing and enables clean separation at predetermined locations, thereby maintaining manufacturing precision while using flexible substrates.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces a release coating layer as an intermediary between the flexible substrate and other components or processing tools. This intermediary layer controls adhesion properties, allowing precise separation when needed while maintaining flexibility, thus resolving the contradiction between flexibility and separation precision.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Strength

If adhesive layers are used to attach components to the flexible substrate, then the bonding strength is improved, but the flexibility and bendability of the device are worsened

Engineering Contradiction:
Improvebonding strengthVSAvoidflexibility
Core Design Contradiction:
StrengthVSAdaptability or versatility

Solution Approach 1:

The patent uses thin-film adhesive layers deposited directly on the flexible substrate. These thin films provide sufficient bonding strength for component attachment while maintaining the overall flexibility of the device structure, as the thin adhesive layer does not significantly restrict bending or deformation of the flexible substrate.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent creates a composite structure combining the flexible substrate with thin adhesive layers and functional components. This composite design distributes mechanical stress across multiple layers, allowing the adhesive to provide bonding strength while the flexible substrate maintains overall device flexibility and bendability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of flexible display devices with reduced damage during separation and minimizes bubble defects, offering improved flexibility and stability in the manufacturing process.

Implementation Method 1

The debonding layer may be formed by forming a silane compound layer including a self-assembled monolayer on the carrier substrate

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Implementation Method 2

The inorganic adhesive layer may be formed by depositing the metal oxide material on the debonding layer

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS10133099B2Method of manufacturing a device substrate and a display device manufactured using the same
Publication Date: 2018.11.20 SAMSUNG DISPLAY CO LTD
  • US10133099B2 patent drawing
  • US10133099B2 patent drawing
  • US10133099B2 patent drawing

AI summary

A device substrate manufacturing method includes forming a debonding layer on a carrier substrate. An inorganic adhesive layer is formed on at least a portion of the debonding layer. A process substrate is formed on the carrier substrate. A device is formed on the process substrate, and the process substrate is separated from the carrier substrate.