Flexible Suction Release for Multilayer Imprint Separation
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Solution Overview
Problem
In nano imprint lithography, the large mold release force during the separation of templates from cured materials can lead to dust generation, which may cause defects in devices, especially in batch imprinting methods where the area of contact is large, and mechanical contact methods risk contaminating the substrate or template.
Innovation Solution
A processing apparatus with a flexible member that uses a deformation mechanism, such as an electromagnet and ferromagnetic material, to create a start point for separation without mechanical contact, thereby reducing dust generation by applying suction and controlling the release process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a mechanical element is used to form the start point of releasing by inserting a blade into the bonded surface, then the releasing can be initiated, but dust is generated due to mechanical contact between the blade and the template or substrate
Solution Approach 1:
The patent replaces the mechanical blade-based releasing initiation method with a suction-based method. A suction hole is formed in the template to apply negative pressure, which initiates releasing without mechanical contact. This substitution eliminates dust generation while maintaining reliable releasing initiation.
Solution Approach 2:
The patent introduces a suction hole as an intermediary element between the template and the releasing process. By applying suction through this intermediary, releasing is initiated without direct mechanical contact between external tools and the template or substrate, thereby preventing dust generation.
2Productivity
If batch imprinting method is used with large template area to improve throughput, then productivity increases, but mold release force becomes very large leading to increased dust generation
Solution Approach 1:
The patent segments the releasing process by creating a localized suction point through a suction hole in the template. This allows releasing to be initiated at a specific location rather than requiring forceful separation across the entire large template area, thereby reducing dust generation while maintaining high productivity.
Solution Approach 2:
The patent replaces the mechanical force-based releasing method with a suction-based method for large-area templates. By using negative pressure applied through the suction hole, the system can initiate releasing without the large mold release forces that cause dust generation, thus maintaining productivity while reducing harmful effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively forms a start point for separation while minimizing dust generation, reducing the risk of defects and ensuring clean separation of templates from cured materials, even in large-area contact scenarios.
Implementation Method 1
a first holding unit configured to suction and hold a first surface of the multilayer material, a second holding unit configured to suction and hold a second surface facing the first surface of the multilayer material
Implementation Method 2
the deformation mechanism is configured to deform at least a portion of the flexible member so as to form a start point of separation in the multilayer material
Data Source
AI summary
A processing apparatus configured to separate a multilayer material in which a curable composition is sandwiched between a first member and a second member facing each other, includes a first holding unit configured to suction and hold a first surface of the multilayer material, a second holding unit configured to suction and hold a second surface facing the first surface of the multilayer material, and a deformation mechanism, wherein at least one of the first holding unit and the second holding unit is configured to suction and hold the multilayer material via a flexible member, and wherein the deformation mechanism is configured to deform at least a portion of the flexible member so as to form a start point of separation in the multilayer material.