Flexible Template Deformation for Imprint Lithography Thickness Control
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Solution Overview
Problem
In nano-scale fabrication using imprint lithography, controlling the thickness of features formed on a substrate is challenging due to undulations in the template, leading to distortions and incomplete patterning.
Innovation Solution
A flexible template made from fused silica is used to conform to the substrate's surface, allowing for controlled thickness of the imprinting material by applying fluid pressure to deform the template and ensure uniform contact, thereby minimizing variations in feature thickness and preventing distortions during the etching process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a rigid template is used in imprint lithography, then the structural stability is maintained, but the feature thickness uniformity deteriorates due to undulations in the template
Solution Approach 1:
The patent employs a flexible template made from fused silica that can deform under fluid pressure to conform to the substrate surface. This flexible template eliminates undulations and ensures uniform contact across the entire substrate area, achieving feature thickness uniformity of δt1 and δt2 ≤ 5 nanometers while maintaining structural integrity through the flexible material properties
Solution Approach 2:
The patent changes the physical state of the template from rigid to flexible, allowing it to adapt its shape dynamically. By applying fluid pressure, the template deforms to match the substrate contour, ensuring uniform imprinting contact and eliminating thickness variations that would occur with a rigid template
2Manufacturing precision
If fluid pressure is applied to deform the template, then the feature thickness uniformity is improved, but the device complexity increases
Solution Approach 1:
The patent uses a fluid dispense system that delivers fluid under controlled pressure to the template-substrate interface. This pneumatic/hydraulic approach enables precise control of template deformation and contact pressure, achieving uniform feature thickness (δt1 and δt2 ≤ 5 nanometers) through fluid pressure modulation rather than complex mechanical actuators
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach achieves uniform thickness of features within specified tolerances, ensuring complete patterning of the substrate without distortions, as demonstrated by maintaining δt1 and δt2 less than or equal to 5 nanometers over a 25 millimeter area, allowing for accurate exposure and patterning of the entire substrate surface.
Implementation Method 1
A flexible template made from fused silica is used to conform to the substrate's surface, allowing for controlled thickness of the imprinting material by applying fluid pressure to deform the template
Implementation Method 2
The deformation may result from a pressure differential created between the mold and a side of the template disposed opposite to the mold
Implementation Method 3
The deformation is sufficient to create a returning force that is greater than an adhesion forced between the solidified imprinting material and the mold
Data Source
AI summary
The present invention provides a method for separating a mold from solidified imprinting material that includes creating deformation in the template in which the mold is included. The deformation is sufficient to create a returning force that is greater than an adhesion forced between the solidified imprinting material and the mold. For example, the deformation may result from a pressure differential created between the mold and a side of the template disposed opposite to the mold. In this manner, the distortion may be undulations in the template of sufficient magnitude to contact a substrate upon which the solidified imprinting material is disposed.