Flexible Via Hole Etching for Bendable OLED Display Panels

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Solution Overview

Problem

Current display panel manufacturing processes are complex due to the etching requirements for main via holes, limiting the flexibility and dynamic bending capabilities of OLED displays, and there is a need for optimized design and etching processes to achieve truly flexible and curable screens.

Innovation Solution

A method for manufacturing a display panel involving sequential layer formation on a substrate, including a water-oxygen barrier layer, buffer layer, active layer, and gate insulating layers, followed by precise lithography and etching processes to create different types of via holes, which are then filled with flexible materials and metal layers to enhance flexibility and stress management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the existing etching process for main via holes is used, then the via holes can be formed, but the manufacturing process becomes relatively complicated

Engineering Contradiction:
Improvevia hole formationVSAvoidetching process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines the formation of first via holes (through the entire thickness excluding substrate) and second via holes (through all layers including substrate) into a single etching process step. This merging of operations reduces the overall manufacturing complexity while maintaining the precision needed for different via hole types in the display and non-display areas.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The etching process is designed to perform multiple functions simultaneously: creating via holes in both display and non-display areas, forming different via hole depths and configurations, and preparing structures for subsequent flexible material filling and metal layer deposition, all within a unified manufacturing approach.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Shape

If static edge bending is implemented, then the edge of the display panel can be bent, but the display area cannot be bent

Engineering Contradiction:
Improveedge bendingVSAvoiddisplay area flexibility
Core Design Contradiction:
ShapeVSAdaptability or versatility

Solution Approach 1:

The patent applies different structural configurations to different areas of the display panel. The non-display area contains first via holes filled with flexible materials to enable bending, while the display area contains second via holes that penetrate through all layers including the substrate, allowing the entire display area to achieve flexibility and dynamic bending capability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent transitions from static edge bending to dynamic bending capability by enabling the display area itself to be flexible. The via hole structures and flexible material filling allow the display panel to dynamically change shape and curvature, achieving truly flexible and curable screens rather than fixed edge bending.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS11349104B2Display panel and method of manufacturing the same
Publication Date: 2022.05.31 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD
  • US11349104B2 patent drawing
  • US11349104B2 patent drawing
  • US11349104B2 patent drawing

AI summary

A display panel and a method of manufacturing the same are provided. The method of manufacturing the display panel includes providing a substrate, and forming other layers on the substrate sequentially. Accordingly, a first via hole, a second via hole, and a third via hole are formed. The first via hole and the second via hole are filled with a flexible material to form a flexible layer and a stress release unit, respectively. Then, a metal layer which fills the third via hole is formed on the interlayer dielectric layer.