Automated Flexural Strength Measurement Apparatus for Semiconductor Test Pieces

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Solution Overview

Problem

The process of measuring flexural strength in semiconductor test pieces is tedious and time-consuming, requiring manual calculations and operations, especially when assessing multiple pieces.

Innovation Solution

A measuring apparatus with a support unit, presser, load measuring unit, and controller that automatically calculates flexural strength based on the test piece's dimensions and applied load, including an image capturing unit for detecting dimensions and a moving mechanism for adjusting support spacing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual calculation and operation is used to assess flexural strength, then measurement precision can be maintained, but productivity decreases and time consumption increases

Engineering Contradiction:
Improvemeasurement efficiencyVSAvoidtime required for assessment
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The measuring apparatus automatically performs the complete measurement and calculation process without requiring manual intervention. The system self-services by capturing images, detecting dimensions, measuring load, and calculating flexural strength automatically, thereby eliminating time-consuming manual operations while maintaining measurement precision

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical measurement and calculation operations with an automated system that uses image capturing units, load measuring units, and controllers. This substitution of mechanical/manual processes with automated technological systems significantly improves productivity and reduces time consumption

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If automated measurement system is implemented, then productivity improves, but device complexity increases

Engineering Contradiction:
Improvemeasurement efficiencyVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The measuring apparatus is designed as a multi-functional integrated system where a single device performs image capturing, dimension detection, load measurement, and flexural strength calculation. This universal approach consolidates multiple functions into one system, improving productivity while managing complexity through functional integration rather than requiring separate devices for each function

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If multiple test pieces are assessed individually, then measurement precision is maintained, but productivity decreases

Engineering Contradiction:
Improvethroughput for multiple piecesVSAvoidtotal time for multiple assessments
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The automated measuring apparatus enables continuous measurement of multiple test pieces without interruption or manual reset between samples. The system continuously captures images, detects dimensions, measures loads, and calculates flexural strengths in sequence, maintaining uninterrupted useful action that significantly increases throughput and reduces total time compared to individual manual assessments

Inventive Principle:
Principle #20Continuity of useful action

Data Source

PatentUS11402310B2Measuring apparatus for measuring a flexural strength of a test piece
Publication Date: 2022.08.02 DISCO CORP
  • US11402310B2 patent drawing
  • US11402310B2 patent drawing
  • US11402310B2 patent drawing

AI summary

A measuring apparatus for measuring a flexural strength of a test piece includes a support unit having a first support member and a second support member that are spaced from each other, for supporting a lower surface of the test piece, a presser for pressing the test piece, a moving mechanism for relatively moving the presser toward and away from the test piece supported by the support unit, a load measuring unit for measuring a load applied to the presser when the presser presses the test piece supported by the support unit, and a controller having a calculating section for calculating the flexural strength of the test piece on the basis of a thickness and a width of the test piece, a spacing between the first support member and the second support member, and a maximum value of the load measured by the load measuring unit.