Flexure Mechanism Module Absorbs Slide Deformation in Precision Stages
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Solution Overview
Problem
Sample traveling stages used in semiconductor and FPD inspection equipment face deformation issues due to slide guide errors and thermal expansion, leading to measuring errors and reduced control safety, with existing solutions either failing to adequately compensate for deformation or increasing costs and complexity.
Innovation Solution
A sample traveling stage incorporating a flexure mechanism module with shock-absorbing holes and deformation lines to absorb slide deformations, providing a deformation space and mounting points, connected to the slide via bolts, which absorbs and minimizes deformation transfer to the sample table, allowing for a one-body configuration or bolt connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If slide and sample table are connected rigidly to ensure structural stability, then structural strength is improved, but deformation is transferred to the sample table causing measuring errors
Solution Approach 1:
A flexure mechanism module is introduced as an intermediary between the slide and sample table. This module includes a body with deformation lines and shock-absorbing holes that allow controlled deformation to absorb slide deformations while preventing their transfer to the sample table, thus maintaining both structural integrity and measurement precision
Solution Approach 2:
The flexure mechanism changes the mechanical parameters of the connection between slide and sample table by introducing controlled flexibility through deformation lines and shock-absorbing holes, allowing the system to adapt to thermal expansion and manufacturing errors while maintaining measurement accuracy
2Stability of the object's composition
If expensive materials like Invar or Zerodur are used to reduce thermal expansion, then thermal stability is improved, but manufacturing cost increases
Solution Approach 1:
The patent replaces expensive thermal-stable materials (Invar, Zerodur) with cheaper aluminum alloys, accepting that the slide will deform due to thermal expansion, and uses the flexure mechanism to absorb this deformation rather than relying on expensive material properties
Solution Approach 2:
The patent converts the harmful effect of aluminum's thermal expansion into a beneficial feature by designing the flexure mechanism to accommodate and absorb the expected deformation patterns, transforming a material weakness into a controlled design parameter
3Measurement precision
If complex deformation compensation mechanisms are added to eliminate measuring errors, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The flexure mechanism is segmented into distinct functional elements: the body with deformation lines for controlled flexibility, shock-absorbing holes for stress relief, and mounting parts for connection. This segmentation achieves deformation compensation through a relatively simple, modular structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves measuring accuracy, reduces error rates, lowers manufacturing costs, and enhances productivity by maintaining stability and reducing material costs, allowing aluminum alloys to replace more expensive materials like Invar or Zerodur.
Implementation Method 1
a flexure mechanism module (50) which absorbs deformation of the slide (30)
Implementation Method 2
in the case that ambient temperature changes, the deformation degree is different due to differences in the thermal expansion coefficient between slide (113, 114) and sample table (116)
Data Source
AI summary
A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver. The deformation error of the mirror and sample, including the sample table, decreases because deformation by the slide is not delivered to the sample table, and measuring accuracy improves because the relative distance of the mirror and the sample is set. Productivity improves due to the minimization of defective proportions because the accuracy is improved.