Flip Chip Bonder Cooling Mechanism for Bonding Time Reduction

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Solution Overview

Problem

In flip chip bonding, the conventional technique of suctioning a chip to a bonding tool with a gap results in significant displacement of the chip's position and direction, leading to lowered bonding quality and increased bonding time due to the need for cooling the bonding tool using air at normal temperatures.

Innovation Solution

A flip chip bonder equipped with a flip mechanism, a bonding tool, and a cooling mechanism that cools the holding member to a predetermined temperature before receiving the chip, allowing for efficient heat transfer and reduced bonding time without compromising quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the bonding tool is cooled using air at normal temperatures, then the bonding tool temperature is reduced below the melting temperature of the non-conductive film, but the bonding time is significantly increased

Engineering Contradiction:
Improvebonding tool temperatureVSAvoidbonding time
Core Design Contradiction:
TemperatureVSLoss of time

Solution Approach 1:

A cooling member is introduced as an intermediary between the bonding tool and the environment. This cooling member has a cooling function that actively removes heat from the bonding tool, enabling rapid temperature reduction without relying on slow air cooling. The cooling member acts as a heat exchange mediator that facilitates efficient thermal energy removal from the bonding tool.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the thermal parameters of the bonding tool by introducing an active cooling mechanism. Instead of relying on passive air cooling that maintains ambient temperature, the cooling member enables active temperature control, rapidly changing the bonding tool temperature from above the non-conductive film melting point to below it, thereby reducing the time the tool remains at harmful high temperatures.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If the chip is suctioned to the bonding tool with a gap from the holding member, then the chip can be transferred, but the position and direction of the chip are largely displaced

Engineering Contradiction:
Improvechip transfer capabilityVSAvoidchip alignment precision
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

A support member is introduced as an intermediary structure that receives the chip from the holding member and transfers it to the bonding tool. This support member provides a stable intermediate platform that maintains chip position and orientation during the transfer process, preventing the large displacements that occur when chips are suctioned with gaps between components.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If the non-conductive film melts at the same time as the bumps, then the resin molding is performed during bonding, but the non-conductive film adversely attaches to the holding member when the bonding tool at high temperature contacts the chip

Engineering Contradiction:
Improvebonding efficiencyVSAvoidnon-conductive film attachment to holding member
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The cooling member acts as a thermal mediator that prevents harmful heat transfer to the holding member. By actively cooling the bonding tool, the cooling member ensures that even when the bonding tool contacts the chip during transfer, the temperature remains below the non-conductive film melting point, preventing the film from adhering to the holding member while still allowing efficient bonding operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces bonding time by enabling higher temperatures for the bonding tool during chip transfer, thereby enhancing alignment and quality while shortening the overall bonding cycle.

Implementation Method 1

a cooling mechanism configured to cool the holding member to a predetermined temperature before the bonding tool receives the chip, allowing for efficient heat transfer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

the temperature of the bonding tool is increased up to the melting temperature of bumps (about 300°C.), the non-conductive film (NCF) melts at the same time as the bumps melt

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

the temperature of the bumps and the non-conductive film (NCF) decreases and the metal of the molten bumps and the molten resin are hardened

Methodology Applied
Scientific EffectPhase change (melting and solidification): Phase Change

Data Source

PatentUS9536856B2Flip chip bonder and flip chip bonding method
Publication Date: 2017.01.03 YAMAHA ROBOTICS CO LTD
  • US9536856B2 patent drawing
  • US9536856B2 patent drawing
  • US9536856B2 patent drawing

AI summary

Provided is a flip chip bonder including: a pickup flipping collet configured to flip a chip; and a bonding tool configured to receive the chip flipped with the pickup flipping collet from the pickup flipping collet and to bond the received chip to a circuit board. The pickup flipping collet includes a cooling channel through which cooling air flows to cool the pickup flipping collet. Thus, bonding time can be reduced without lowering bonding quality.