Liquid Tank Float Sensing for Precise Chemical Level Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current semiconductor manufacturing processes face challenges in accurately measuring and regulating the quantity of liquids in liquid supply systems, which can lead to inefficiencies and potential chemical waste due to inadequate monitoring and control of liquid levels and mixtures during wet chemical processing operations.
Innovation Solution
A liquid supply system equipped with a liquid measurement module that uses a floating member and detection signal to accurately measure liquid levels in tanks, allowing for real-time monitoring and regulation, including automatic refilling and mixing processes to maintain optimal liquid levels and prevent leakage or viscosity issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional liquid level measurement methods are used in liquid supply systems, then the system structure remains simple, but measurement precision and liquid level control accuracy deteriorate
Solution Approach 1:
The patent replaces traditional mechanical float-based liquid level measurement systems with a laser-based optical detection system. A laser beam is projected vertically downward, and a photodetector measures the position of the liquid surface by detecting the reflected or scattered light, thereby determining the liquid level with high precision without mechanical contact.
Solution Approach 2:
The patent introduces a laser beam as an intermediary between the liquid surface and the detection system. The laser light interacts with the liquid surface, and the reflected or scattered light carries information about the liquid level position, enabling non-contact measurement and improving both accuracy and system reliability.
2Productivity
If manual monitoring and regulation of liquid levels is performed, then device complexity remains low, but productivity and processing efficiency deteriorate
Solution Approach 1:
The patent implements a feedback control system where the photodetector continuously monitors the liquid level by detecting laser light position, and this information is fed back to a control system that automatically adjusts liquid supply or discharge rates to maintain optimal liquid levels, thereby improving processing efficiency without requiring manual intervention.
Solution Approach 2:
The liquid supply system performs self-regulation of liquid levels through automated control based on photodetector feedback. The system automatically adjusts pump operations, valve positions, or flow rates to maintain desired liquid levels, eliminating the need for manual monitoring and regulation while improving productivity.
3Loss of substance
If inadequate liquid level monitoring is implemented, then device complexity remains low, but loss of substance increases due to chemical waste
Solution Approach 1:
The patent uses photodetector-based liquid level detection with laser illumination to provide continuous feedback on liquid levels in chemical storage and processing vessels. This enables precise control of chemical usage, prevents overflow or spillage, and ensures optimal liquid levels during processing, thereby reducing chemical waste while maintaining manageable system complexity through non-contact measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and efficiency of liquid management in semiconductor manufacturing, reducing waste and ensuring consistent processing conditions by providing precise control over liquid levels and mixtures, thereby improving the reliability of semiconductor fabrication processes.
Implementation Method 1
a floating member located in the tube and configured to float on the liquid
Implementation Method 2
a detection member configured to emit a detection signal toward the floating member
Data Source
AI summary
A liquid supply system is provided. The liquid supply system includes a liquid tank configured to store a liquid. The liquid supply system also includes a liquid measurement module positioned outside the liquid tank and fluidly connected two connecting ports that are located at opposite sides of a surface of the liquid stored in the liquid tank. The liquid tank includes a tube extends parallel to a height direction of the liquid tank. The liquid tank also includes a floating member located in the tube and configured to float on the liquid. The liquid tank further includes a detection member configured to emit a detection signal toward the floating member.