Float-Tube Liquid Level Sensing for Wet Chemical Supply Control
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in accurately measuring and regulating the quantity of liquids used in wet chemical processing operations, leading to inefficiencies and potential abnormalities in liquid supply systems.
Innovation Solution
A liquid supply system equipped with a liquid measurement module that uses a detection member to monitor the position of a floating member in a tube connected to a liquid tank, allowing real-time measurement of liquid levels and viscosity, and a controller to regulate liquid flow and detect abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional liquid measurement methods are used in wet chemical processing, then the system structure remains simple, but measurement precision and reliability deteriorate
Solution Approach 1:
The liquid measurement module is nested within the liquid supply system, with the detection member and floating member integrated into the existing liquid delivery pathway. This allows precise liquid level and flow measurement without adding separate external measurement systems, thereby improving measurement precision while minimizing increases in overall system complexity.
Solution Approach 2:
The patent replaces traditional mechanical liquid level indicators with a detection member that uses optical or electromagnetic fields to detect the position of the floating member. This substitution improves measurement precision by eliminating mechanical wear and human reading errors, while the automated detection system actually simplifies the operational complexity despite adding technological components.
2Productivity
If manual liquid supply regulation is used, then the system remains simple to operate, but productivity and manufacturing precision deteriorate
Solution Approach 1:
The liquid supply system incorporates automatic regulation capabilities where the controller autonomously adjusts liquid flow based on real-time measurements from the detection member. The system self-regulates to maintain optimal liquid levels and flow rates without requiring constant manual intervention, thereby improving productivity while the automated control actually reduces operational complexity by eliminating manual monitoring and adjustment tasks.
Solution Approach 2:
The system implements a feedback loop where the detection member continuously monitors liquid parameters and sends signals to the controller, which then adjusts the liquid supply accordingly. This automatic feedback mechanism improves productivity by ensuring consistent liquid supply without manual intervention, and while it adds control system components, it simplifies operation by replacing complex manual regulation with automated responsive control.
3Reliability
If liquid supply is not monitored in real-time, then the system structure remains simple, but reliability deteriorates due to undetected abnormalities
Solution Approach 1:
The detection member is positioned to detect liquid level and flow conditions before abnormalities can cause processing defects or system failures. By monitoring liquid parameters in advance, the system can trigger alerts or automatic corrections before reliability issues arise, thereby improving reliability while the integrated nature of the monitoring keeps the added complexity minimal.
Solution Approach 2:
The real-time monitoring system provides continuous feedback to the controller, enabling immediate detection and response to liquid supply abnormalities. This feedback mechanism improves reliability by ensuring that issues are detected and addressed promptly, while the automated monitoring and response system actually reduces operational complexity by eliminating the need for manual inspection and intervention.
4Manufacturing precision
If precise liquid measurement is implemented, then manufacturing precision improves, but loss of time in measurement and regulation increases
Solution Approach 1:
The detection member operates continuously to monitor liquid levels and flow rates throughout the wet chemical processing operation. This continuous measurement eliminates the need for intermittent manual sampling and measurement, thereby achieving precise liquid dosage control without adding time delays. The automated continuous monitoring actually reduces total time by eliminating manual intervention cycles while maintaining high manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances accuracy in liquid measurement and detection of system abnormalities, ensuring reliable and efficient liquid supply for semiconductor processing, reducing the risk of leakage and improving operational flexibility.
Implementation Method 1
a floating member positioned in a tube that positioned outside of the liquid tank. The tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid
Implementation Method 2
calculating a time interval between a first time point when the detection signal is generated and a second time point when the detection signal is received
Data Source
AI summary
A liquid preparation method is provided. The method includes measuring, with a detection member, a quantity of a liquid stored in a liquid tank by emitting a detection signal toward a floating member positioned in a tube. The tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid, and the position of the floating member in the tube varies according to a level of the liquid in the liquid tank. The method also includes regulating the liquid in the liquid tank in response to the quantity of the liquid in the liquid tank.