Floating-Coil Matching Circuit for Stable Plasma Impedance
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in efficiently matching the impedance of the load to the output impedance of the radio-frequency power supply, particularly due to variations in plasma conditions.
Innovation Solution
The proposed matching circuit includes a plurality of reactance elements and relays, where each relay has a relay switch with contacts connected to reactance elements and a relay coil that is floating with respect to radio frequencies, allowing for adjustable impedance matching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a matcher includes a plurality of capacitors and switching elements to adjust variable capacitance, then impedance matching capability is improved, but device complexity increases
Solution Approach 1:
The patent replaces mechanical switching elements with relays that have floating relay coils. This substitution eliminates the need for complex switching mechanisms while maintaining the ability to adjust capacitance values for impedance matching, thereby reducing device complexity while preserving adaptability.
Solution Approach 2:
The patent employs relays with floating relay coils that can dynamically switch between different capacitance values. The floating coil design allows the relay to respond to radio frequency signals and automatically adjust the matching circuit configuration, providing dynamic impedance matching without requiring complex control systems.
2Adaptability or versatility
If switching elements are used to adjust variable capacitance, then adaptability to plasma conditions is improved, but power loss increases
Solution Approach 1:
The patent replaces conventional switching elements with relay-based switching mechanisms. The relay structure with floating coils minimizes contact resistance and switching losses, thereby reducing power loss while maintaining the ability to adapt to varying plasma conditions through capacitance adjustment.
Solution Approach 2:
The floating relay coil design enables the relay to self-adjust and self-regulate during operation. The relay automatically responds to the radio frequency environment and plasma conditions, minimizing the need for external control and reducing energy loss associated with active control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient impedance matching across varying plasma conditions, reducing power loss and enhancing the stability and efficiency of the plasma processing apparatus.
Implementation Method 1
in each of the plurality of relays, the relay coil is provided so as to float from the ground with respect to radio frequencies
Data Source
AI summary
A matching circuit includes: a plurality of reactance elements connected to a supply line for supplying radio-frequency power for plasma generation; and a plurality of relays, wherein each of the plurality of relays includes a relay switch having a first contact connected to a corresponding reactance element among the plurality of reactance elements and a second contact connected to a ground, and a relay coil, wherein in each of the plurality of relays, the relay coil is provided so as to float from the ground with respect to radio frequencies.