Floating Conveying Stage with Detachable Opening for Laser Beam Profiling
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Solution Overview
Problem
Existing laser annealing apparatuses do not effectively measure the beam profile of the laser beam, leading to inefficiencies such as increased cycle time, electrostatic charging, contamination, and reduced productivity due to the design constraints of the conveying stage.
Innovation Solution
A laser irradiation apparatus is configured with a detachable part of the conveying stage that can be removed to allow for the measurement of the beam profile through an opening, enabling the beam profiler to measure the laser beam without obstruction, while maintaining the floating-type conveying stage for efficient workpiece handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the conveying stage is designed as a fixed structure to maintain stability during workpiece conveyance, then the structural stability is improved, but the ability to measure beam profile is worsened due to obstruction
Solution Approach 1:
The conveying stage is divided into a fixed portion and a movable portion that can be independently controlled. The movable portion can be retracted or positioned away from the optical path to allow beam profile measurement, while the fixed portion maintains structural stability during workpiece conveyance.
Solution Approach 2:
The conveying stage incorporates dynamic positioning capability where the stage structure can change its configuration between a closed position for stable conveyance and an open position for beam profile measurement. This dynamic adjustment allows the system to optimize for either stability or measurement accuracy depending on the operational requirement.
2Object-affected harmful factors
If the conveying stage structure is made closed and fixed to prevent contamination and electrostatic charging, then the protection against harmful factors is improved, but the measurement capability is worsened due to lack of access
Solution Approach 1:
The conveying stage is segmented into fixed and movable portions, allowing the movable portion to be opened for beam profile measurement while the fixed portion continues to provide protection against contamination and electrostatic charging during normal operation.
Solution Approach 2:
The system performs beam profile measurement at predetermined intervals or before/after workpiece processing by temporarily opening the movable portion of the conveying stage. This preliminary or periodic measurement action allows quality control without compromising the protective function during actual workpiece conveyance.
3Measurement precision
If the beam profiler is positioned to measure the laser beam, then the measurement capability is improved, but the workpiece conveyance is worsened due to obstruction or interference
Solution Approach 1:
The beam profiler and conveying stage are designed with dynamic positioning capabilities. The beam profiler can be moved into position for measurement, and the conveying stage can be opened to allow the measurement without creating permanent obstructions. This dynamic coordination ensures that measurement and conveyance operations do not interfere with each other.
Solution Approach 2:
The system uses spatial coordination in multiple dimensions to resolve the conflict between measurement and conveyance. The beam profiler measures the beam in the optical path dimension while the conveying stage operates in the mechanical conveyance dimension, with temporal coordination that allows measurement only when the stage is opened and no workpiece is present.
Data Source
AI summary
A laser annealing apparatus (1) according to an embodiment includes a laser oscillator (4) configured to generate a laser beam (L), a floating-type conveying stage (3) configured to float and convey a workpiece (W) to be irradiated with the laser beam (L), and a beam profiler (7) configured to measure a beam profile of the laser beam (L). The floating-type conveying stage (3) includes a conveying surface (3a) opposed to the workpiece (W), and a bottom surface (3b) on the side opposite to the conveying surface (3a). The beam profiler (7) is positioned below the bottom surface (3b) of the floating-type conveying stage (3). The floating-type conveying stage (3) includes a detachable part (12) in a part of it. An opening (S) is formed by detaching the detachable part (12) from the floating-type conveying stage (3), the opening (3) extending from the conveying surface (3a) to the bottom surface (3b). The beam profiler (7) is configured to measure the beam profile of the laser beam (L) through the opening (S).