Floating Conveyor Block Arrangement for Substrate Stability
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Solution Overview
Problem
In liquid crystal manufacturing and similar processes, floating conveyors face issues with substrate bending and collision due to gaps between floating blocks, especially with larger or thinner substrates, leading to potential conveyance interruptions and uneven treatment.
Innovation Solution
A substrate processing apparatus with a floating conveyor system featuring a lower and upper floating section, where floating blocks are arranged with spaces to accommodate treatment liquid supply devices, ensuring continuous floating force application across the substrate by alternating the facing floating blocks, preventing deformation and collision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If floating blocks are arranged with spaces between them to accommodate treatment liquid supply devices, then treatment liquid can be supplied to the substrate, but the substrate may bend and collide with floating blocks in the space portions where no floating force exists
Solution Approach 1:
The patent introduces a dual-layer floating block structure with upper and lower floating blocks arranged at different vertical positions. The upper floating blocks are positioned to provide floating force in regions where lower floating blocks create spaces for treatment liquid supply. This vertical dimensionality change allows treatment liquid supply devices to be accommodated in horizontal spaces while maintaining continuous floating force coverage from both upper and lower blocks, preventing substrate bending and collision.
2Reliability
If floating blocks are arranged closer together to eliminate spaces, then substrate bending and collision are prevented, but no space is available for arranging treatment liquid supply devices
Solution Approach 1:
The patent resolves this contradiction by utilizing the vertical dimension to create horizontal spaces. Upper and lower floating blocks are arranged at different vertical levels, creating horizontal gaps between corresponding blocks. These gaps are specifically designed to accommodate treatment liquid supply devices while the overlapping vertical arrangement ensures continuous floating force coverage, eliminating substrate bending issues while maintaining treatment capability.
3Area of stationary object
If a plurality of floating blocks are arranged to support larger substrates, then the substrate can be fully supported, but the complexity of the floating conveyor system increases
Solution Approach 1:
The patent divides the floating support system into upper and lower floating block layers, with each layer containing multiple segmented blocks. This segmentation allows the system to support large substrates by distributing the support function across multiple smaller blocks arranged in a coordinated pattern. The modular segmented structure makes the system scalable and manageable while providing comprehensive coverage for large substrate areas.
Solution Approach 2:
The patent reduces system complexity by introducing vertical layering. Instead of arranging all floating blocks in a single horizontal plane requiring complex coordination, the system uses upper and lower layers that can independently function. This vertical dimensionality simplifies the arrangement logic while maintaining comprehensive substrate support coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively conveys substrates without interruptions, maintaining uniform treatment by ensuring continuous floating force application through the arrangement of floating blocks and treatment liquid supply devices, enhancing work efficiency and preventing substrate deformation.
Implementation Method 1
a plurality of gas ejection holes and gas suction holes are formed on the surface of the floating block
Data Source
AI summary
According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.