Floating Diffusion Layout for Faster Charge Transfer in Photodetectors

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Solution Overview

Problem

CMOS image sensors face slow charge transfer speed due to large p-n junction areas in photodetectors, which limits operational speed.

Innovation Solution

The design incorporates a non-linear transfer gate electrode shape and a non-rectangular floating diffusion region to reduce the average distance between the pinned photodiode layer and the floating diffusion region, enhancing charge transfer speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a large p-n junction area is used in a photodetector, then photosensitivity is increased, but charge transfer speed to the floating diffusion region decreases

Engineering Contradiction:
ImprovephotosensitivityVSAvoidcharge transfer speed
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The patent segments the large p-n junction area into multiple smaller photodetector elements, each with its own floating diffusion region. This segmentation allows each element to maintain fast charge transfer speed while the collective array preserves high photosensitivity. The charge transfer path is divided into multiple parallel channels rather than one long path.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a single large planar p-n junction to a three-dimensional arrangement where multiple photodetector elements are stacked or arranged in layers above the floating diffusion region. This vertical dimensionality change reduces the lateral charge transfer distance while maintaining total photosensitive area through multi-layer configuration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Speed

If the distance between the pinned photodiode layer and the floating diffusion region is reduced, then charge transfer speed is enhanced, but the photosensitive area may be compromised

Engineering Contradiction:
Improvecharge transfer speedVSAvoidphotosensitive area
Core Design Contradiction:
SpeedVSArea of stationary object

Solution Approach 1:

The patent utilizes vertical stacking to reduce lateral distance between the pinned photodiode layer and floating diffusion region. By arranging these components in the vertical dimension rather than spreading them horizontally, the charge transfer path is shortened while the horizontal photosensitive area is preserved or even expanded through multi-layer configuration.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a nested structure where the floating diffusion region is positioned directly beneath the pinned photodiode layer in the vertical stack, with the transfer gate electrode nested between them. This nested arrangement minimizes the charge transfer distance while maintaining adequate photosensitive area at the top layer.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases the operational speed of the photodetector by reducing the maximum lateral separation distance between the pinned photodiode layer and the floating diffusion region, thereby improving charge transfer efficiency.

Implementation Method 1

These devices utilize an array of pixels (which may include photodiodes and transistors) to detect radiation using photogeneration of electron-hole pairs.

Methodology Applied
Scientific EffectPhotogeneration: Photoelectric Effect

Implementation Method 2

Fast charge transfer to the floating diffusion region may increase the operational speed of a photodetector in CMOS image sensors.

Methodology Applied
Scientific EffectCharge transfer: Conduction (electrical)

Data Source

PatentUS11837614B2Fast charge transfer floating diffusion region for a photodetector and methods of forming the same
Publication Date: 2023.12.05 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11837614B2 patent drawing
  • US11837614B2 patent drawing
  • US11837614B2 patent drawing

AI summary

A subpixel including at least one second-conductivity-type pinned photodiode layer that forms a p-n junction with a substrate semiconductor layer, at least one floating diffusion region, and at least one transfer gate stack structure. The at least one transfer gate stack structure may at least partially laterally surround the at least one second-conductivity-type pinned photodiode layer with a total azimuthal extension angle in a range from 240 degrees to 360 degrees around a geometrical center of the second-conductivity-type pinned photodiode layer. The at least one transfer gate stack structure may include multiple edges that overlie different segments of a periphery of the at least one second-conductivity-type pinned photodiode layer, and the floating diffusion region includes a portion located between the first edge and the second edge. In addition, multiple transfer gate stack structures and multiple floating diffusion regions may be present in the subpixel.