Floating Electrode Signal Processing Circuit for Manufacturing Variation Correction
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Solution Overview
Problem
Variations in manufacturing processes, such as etching and impurity density variations, lead to deviations in the characteristics of signal processing circuits in electronic devices, resulting in errors in signal processing.
Innovation Solution
An electronic device with a signal processing section and a floating electrode that accumulates charge through electron beam irradiation, allowing for adjustment of electric characteristics to achieve prescribed signal processing outcomes, and a manufacturing method that forms and tests these components to ensure accurate signal processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional manufacturing processes are used for signal processing circuits, then production efficiency is maintained, but manufacturing precision deteriorates due to variations in etching and impurity density
Solution Approach 1:
The patent introduces a floating electrode structure that is prepared in advance during manufacturing, which can later be irradiated with electron beams to adjust circuit characteristics. This preliminary preparation enables post-manufacturing adjustment without requiring rework of the entire manufacturing process, thus improving precision without significantly impacting productivity
Solution Approach 2:
The patent changes the physical state of the floating electrode from neutral to charged by irradiating it with electron beams. This parameter change (adding negative charge) directly adjusts the electrical characteristics of the signal processing circuit, allowing precise control of circuit behavior after manufacturing to compensate for process variations
2Reliability
If signal processing circuits are manufactured with standard processes, then ease of manufacture is maintained, but reliability deteriorates due to characteristic deviations from specifications
Solution Approach 1:
The floating electrode structure serves a dual purpose: it is both a structural component and a characteristic adjustment mechanism. The same structure that is formed during manufacturing also serves as the means for post-manufacturing adjustment, eliminating the need for separate correction components and simplifying the overall manufacturing process while improving reliability
Solution Approach 2:
The patent implements a feedback mechanism where the characteristics of the signal processing circuit are measured, and based on these measurements, the floating electrode is irradiated with appropriate electron beam doses to adjust the characteristics back to specification. This closed-loop approach ensures high reliability while maintaining manufacturing simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the precise adjustment of electric characteristics in signal processing circuits, ensuring that the output signals meet prescribed specifications by using electron beam irradiation to correct any errors in the manufacturing process, thereby improving the reliability and accuracy of signal processing.
Implementation Method 1
a floating electrode that accumulates a charge by being irradiated by an electron beam
Data Source
AI summary
Provided is an electronic device that generates an output signal corresponding to an input signal, comprising a signal processing section that receives the input signal and outputs the output signal corresponding to the input signal, and a floating electrode that accumulates a charge by being irradiated by an electron beam. The signal processing section adjusts electric characteristics of the output signal according to a charge amount accumulated in the floating electrode, and includes a transistor formed on the semiconductor substrate between an input terminal that receives the input signal and an output terminal that outputs the output signal. The floating electrode is formed between a gate electrode of the transistor and the semiconductor substrate.