Floating Pad Air Holes for Uniform Substrate Support
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Solution Overview
Problem
Existing stage units for supporting glass substrates during laser annealing processes lack uniform floating capabilities and effective particle prevention, leading to substrate instability and contamination.
Innovation Solution
A stage unit comprising a frame, guide devices, and a floating pad made of ceraphite, which includes air holes to prevent particle adherence, allowing for uniform substrate floating and firm support through diagonal mounts and guide systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional stage unit is used to support the glass substrate, then the substrate can be held during laser annealing, but the substrate cannot be floated uniformly, leading to instability
Solution Approach 1:
The pad is divided into multiple contact points with the substrate, allowing independent support at each point. This segmentation enables uniform distribution of support forces across the substrate surface, achieving stable and uniform floating during laser annealing processes.
2Reliability
If a conventional pad material is used, then the pad can support the substrate, but particles adhere to the pad surface, causing contamination
Solution Approach 1:
The pad is constructed with a porous structure containing multiple through-holes that extend from the top surface to the bottom surface. This porous configuration prevents particles from adhering to the pad surface by allowing air flow through the material, eliminating the contamination issue while maintaining substrate support capability.
3Device complexity
If the frame structure is simplified, then the device complexity is reduced, but the firm support capability is compromised
Solution Approach 1:
The four corner mounts are positioned asymmetrically at the corners of the rectangular frame rather than symmetrically at the center or evenly distributed. This asymmetric corner positioning optimizes the structural support by maximizing the moment of inertia and providing firm support with minimal material, achieving both structural strength and reduced complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stage unit ensures stable and uniform floating of substrates, preventing particle adherence and maintaining substrate integrity during laser annealing, enhancing the crystallization process of amorphous silicon to polysilicon layers.
Implementation Method 1
the floating pad may have a plurality of air holes
Data Source
AI summary
A stage unit may include a frame, a first guide device, a stage, a second guide device and a pad. The first guide device may be arranged over an upper surface of the frame and configured to guide the stage in a first direction. The stage may be movably connected to the first guide device. The second guide device may be arranged over an upper surface of the stage and configured to guide the pad in a second direction substantially perpendicular to the first direction. The pad may be movably connected to the second guide device and configured to support a substrate. Therefore, the substrate may be supported by and uniformly floated by the frame, the stage and the pad.