Floating Stage Cover Mechanism to Prevent Air Intake Hole Blockage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The issue of blockage in the air intake holes of a floating stage during substrate processing, leading to unstable substrate floating and decreased productivity due to clogging by foreign particles and ink, is not effectively addressed in existing technologies.
Innovation Solution
A cover is installed on a moving member to prevent blockage by covering the floating stage, combined with a cleaning unit to remove foreign particles and ink, and a substrate detection sensor to trigger the cover's movement when the substrate is absent.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the floating stage is left open for substrate processing, then the coating process can proceed efficiently, but foreign particles and ink can enter and block the air intake holes
Solution Approach 1:
A cover is installed on the floating stage that can be moved to cover the air intake holes before substrate processing begins. This preliminary protective action prevents foreign particles and ink from entering and blocking the air intake holes during the coating process, ensuring continuous operation without interruptions for cleaning or maintenance.
2Reliability
If the floating stage is covered to prevent blockage, then air intake holes remain clean, but the structure becomes more complex
Solution Approach 1:
The cover is designed as a movable component rather than a fixed structure. It can be dynamically positioned to cover or expose the air intake holes as needed during the substrate processing cycle. This dynamic design provides protection when needed while maintaining structural simplicity and avoiding permanent complexity in the floating stage design.
3Reliability
If frequent cleaning of the floating stage is performed, then blockages are prevented, but productivity is reduced due to operational interruptions
Solution Approach 1:
The cover provides continuous protection of the air intake holes throughout the substrate processing operation, eliminating the need for frequent cleaning interruptions. By preventing blockages proactively rather than reacting to them, the system maintains continuous operation and maximizes productivity while ensuring reliable air intake function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents clogging of air intake holes, maintaining stable substrate floating and improving productivity by reducing the need for cleaning operations and extending coating process duration.
Implementation Method 1
a suction member suctioning foreign particles or ink on an upper surface of the cover
Implementation Method 2
an ultrasonic wave generating member disposed parallel to the cleaning member and ultrasonically vibrating the cleaning liquid
Data Source
AI summary
An apparatus for preventing blockage of a floating stage includes a moving member moving between a floating stage for lifting a substrate and a nozzle disposed above the floating stage, and a cover installed on the moving member and moving between the floating stage and the nozzle by the moving member to cover the floating stage.