Flood Column Lens Support for Stable Charged Particle Pre-Charging
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Solution Overview
Problem
In semiconductor IC manufacturing, existing flood columns for charged particle beam inspection tools face challenges in efficiently pre-charging substrates for defect detection, leading to reduced throughput and increased operator intervention due to voltage contrast issues and differing operating voltages between inspection and flooding modes.
Innovation Solution
A flood column design with a down-beam lens arrangement and electrical insulator support system, allowing for precise positioning and minimizing electrical interference, operates at a similar voltage to the primary column, enabling simultaneous pre-charging and inspection with reduced voltage switching time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a dedicated flood column is used to pre-charge the substrate surface quickly, then the charging conditions are improved and defect detection sensitivity is enhanced, but the device complexity increases and voltage switching between inspection and flooding modes causes time loss
Solution Approach 1:
The patent combines the flood column and assessment column into a single integrated device, sharing common components such as the electron source, lens arrangement, and aperture body. This merging eliminates the need for separate dedicated flood column hardware while maintaining the ability to perform both flooding and assessment functions, thereby reducing device complexity while preserving defect detection sensitivity
Solution Approach 2:
The integrated column is designed to perform multiple functions: it can operate in flood mode to pre-charge substrate surfaces and in assessment mode to detect defects. By making the column universal, the patent eliminates voltage switching between separate devices and reduces operational complexity while maintaining both charging and detection capabilities
2Adaptability or versatility
If voltage switching between inspection and flooding modes is performed, then the operating conditions are adjusted for different functions, but the time required for voltage switching increases and throughput is reduced
Solution Approach 1:
The patent maintains the electron source and lens arrangement at a constant operating voltage throughout both flooding and assessment operations. By keeping the electrical potential stable and avoiding voltage switching, the system achieves equipotential operation that eliminates time loss while still allowing functional transitions between flood and assessment modes through other control parameters
3Object-generated harmful factors
If the lens support is made of electrical insulator material, then electrical interference is minimized and beam quality is improved, but the mechanical strength and positioning precision may be reduced
Solution Approach 1:
The patent introduces an electrical insulator material as an intermediary between the lens arrangement and the aperture body. This insulator layer electrically isolates the lens support structure from the aperture body, preventing electrical interference and charge buildup that would otherwise degrade beam quality, while the overall mechanical positioning is maintained through the rigid support structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances defect detection sensitivity and throughput by maintaining consistent charging conditions, reducing the risk of flooding effects disappearing before inspection, and improving overall process efficiency.
Implementation Method 1
a lens arrangement arranged in a down beam part of the flood column
Implementation Method 2
the lens support comprises an electrical insulator
Implementation Method 3
the flood column is used to provide a relatively large amount of charged particles to quickly charge a predefined area
Data Source
AI summary
Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.