Active Floor Vibration Control for Virtual Stiffness in Buildings
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Solution Overview
Problem
Structures in earthquake-prone areas require low stiffness for earthquake resistance, but high stiffness is necessary for precise semiconductor production, creating a conflict that renders earthquake regions unsuitable for vibration-sensitive machinery.
Innovation Solution
A computer-implemented method for active vibration dampening, using a distributed sensor network to detect and counteract vibrations by creating a virtual stiffness model, allowing for enhanced structural stiffness without compromising earthquake protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the stiffness of a building is kept low for earthquake resistance, then the building can absorb oscillations and waves of earthquakes, but the building cannot provide sufficient stiffness for vibration-sensitive machines like semiconductor production equipment
Solution Approach 1:
The patent applies active vibration control to dynamically adjust the structural characteristics of the building. Sensors detect vibrations in real-time, and actuators apply counter-forces to actively dampen unwanted vibrations, transforming the static low-stiffness structure into a dynamically controlled system that provides virtual stiffness when needed while maintaining earthquake resistance
Solution Approach 2:
The patent introduces an active vibration control system as an intermediary between the building structure and the semiconductor production equipment. This intermediate system includes sensors that detect vibrations and actuators that generate counter-forces, effectively isolating the equipment from structural vibrations without requiring the building itself to be stiffer
2Manufacturing precision
If the stiffness of a building is increased to support vibration-sensitive machines, then the machines can operate with high precision, but the building becomes more vulnerable to earthquake damage
Solution Approach 1:
The patent replaces passive mechanical stiffening of the building structure with an active control system that uses sensors and actuators. Instead of physically reinforcing the building to reduce vibrations, the system electronically detects and actively counteracts vibrations through applied forces, substituting mechanical reinforcement with intelligent control
Solution Approach 2:
The patent changes the approach from modifying permanent structural parameters (stiffness, mass distribution) to dynamically adjusting vibration characteristics through active control. The system modifies vibration parameters in real-time based on sensor feedback, allowing the building to provide high precision when needed without increasing earthquake vulnerability
3Manufacturing precision
If traditional passive vibration isolation measures are used, then some vibration protection is achieved, but the measures are not sufficiently effective for next-generation semiconductor manufacturing requirements
Solution Approach 1:
The patent implements a closed-loop feedback control system where sensors continuously monitor vibrations and feed this information to a control system that adjusts actuator outputs in real-time. This feedback mechanism enables the system to adapt to changing vibration conditions and maintain effective vibration cancellation, achieving superior isolation performance compared to passive measures
Solution Approach 2:
The patent performs preliminary characterization of the building's vibration properties through modal analysis before deploying the active control system. This preliminary action includes measuring the building's natural frequencies, mode shapes, and damping characteristics, which are then used to optimize the control algorithm and sensor/actuator placement for maximum effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively isolates vibrations, optimizing machine efficiency and output quality while enabling semiconductor production in earthquake regions by providing a 'virtual stiffness' to structures, thus supporting high-precision manufacturing.
Implementation Method 1
each device including a vibration transducer for detecting vibrations of the floor
Implementation Method 2
inducing corresponding counter-vibrations in respect to the detected vibrations over the several discrete positions of the floor in dependence of the virtual mass, stiffness, and/or damping model of the floor by repeatedly applying a respective counterforce to the floor
Data Source
Figure 1~2
Figure 3~4
AI summary
The present invention discloses a computer implemented method as well as a system (1) for active dampening vibrations in a building structure having a floor. The method comprises distributing devices (4) vibration transducers (6) and/or vibration generators (7) on the floor (3) capturing data related to vibrations. After inducing initial vibrations, data is captured related to mass, stiffness, and damping distribution. A data model (15) for mass, stiffness, and/or damping properties of the floor is created. The data model (15) is used to calculate effective counter-vibrations corresponding to the previously detected external vibrations to effectively dampen vibrations allowing a deployment of vibration sensitive machinery (8) on said floor (3). Embodiments furthermore disclose an interplay of the proposed system (1) with a building earthquake protection system.