Flotation Conveyance Plate Structure for Uniform Substrate Floating

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Solution Overview

Problem

The flotation accuracy of substrates in flotation conveyance apparatuses is inconsistent, affecting the quality of films processed in laser processing, due to variations in the flotation amount of substrates.

Innovation Solution

A flotation conveyance apparatus with an upper and lower plate configuration, where the upper plate has ejecting ports for gas and the lower plate has flow-paths to supply gas to these ports, reducing pressure loss and preventing gas leakage, thereby maintaining consistent substrate flotation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If gas is blown to the substrate for flotation conveyance, then the substrate can be floated and conveyed, but the flotation amount of the substrate varies

Engineering Contradiction:

Improveflotation accuracyVSAvoidsubstrate position consistency

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The gas supply system is segmented into multiple flow-paths with individual flow rate control, allowing independent adjustment of gas flow to different regions of the substrate to achieve uniform flotation

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The flow rates of gas to different ejecting ports are adjusted as parameters to optimize flotation uniformity, changing the gas flow parameters to eliminate variations in flotation amount across the substrate

Inventive Principle:

Principle #35Parameter changes

2Reliability

If gas flow is increased to improve flotation, then substrate floating is enhanced, but gas leakage occurs

Engineering Contradiction:

Improveflotation stabilityVSAvoidgas leakage

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The lower plate acts as an intermediary component with integrated flow-paths that guide and contain the gas flow, preventing gas leakage while maintaining flotation stability

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system uses pneumatic principles with controlled gas flow through designed flow-paths and ejecting ports to achieve stable flotation without excessive gas pressure that would cause leakage

Inventive Principle:

Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the accuracy of substrate flotation, reducing variations in the substrate's position and improving the quality of laser-processed films by maintaining consistent gas flow and preventing gas leakage.

Implementation Method 1

Flow-paths for supplying the gas to the plurality of ejecting ports are provided on at least one of the upper plate and the lower plate

Methodology Applied

Scientific EffectGas pressure: Pressure Increase

Implementation Method 2

a flotation conveyance apparatus for conveying a substrate while floating the substrate by ejecting a gas to a lower surface of the substrate

Methodology Applied

Scientific EffectGas flow:

Data Source

PatentUS12103790B2Flotation conveyance apparatus and laser processing apparatus

Publication Date: 2024.10.01 JSW AKTINA SYST CO LTD

AI summary

A flotation conveyance apparatus according to an embodiment conveys a substrate while floating the substrate by ejecting a gas to a lower surface of the substrate. The flotation conveyance apparatus includes an upper plate disposed on the substrate side including a plurality of ejecting ports for ejecting the gas and a lower plate disposed under the upper plate. Flow-paths for supplying the gas to the plurality of ejecting ports are provided on at least one of the upper plate and the lower plate.