Flotation Unit Slits for Laser Processing Gas Stagnation
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Solution Overview
Problem
The flotation accuracy of substrates in flotation conveyance apparatuses is compromised due to variations in flotation amounts, which affects the quality of films processed in laser processing, particularly in manufacturing liquid crystal display panels and organic EL panels.
Innovation Solution
A flotation conveyance apparatus with a flotation unit that ejects gas through a plurality of ports on its surface and includes slits penetrating vertically, allowing the gas to be discharged to the lower surface side, thereby stabilizing the substrate's attitude and improving flotation accuracy by preventing gas stagnation between the substrate and the unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas is ejected to float the substrate, then the substrate can be conveyed without contact, but gas stagnation occurs between the substrate and flotation unit causing flotation amount variation
Solution Approach 1:
The patent extracts the stagnated gas from the space between the substrate and flotation unit by providing slits that allow the gas to escape to the lower surface side of the flotation unit. This removes the harmful gas accumulation that causes flotation amount variation, while maintaining the contactless conveyance function.
Solution Approach 2:
The flotation unit is designed with slits that function as porous structures, allowing selective passage of gas. The slits enable trapped gas to escape while maintaining the overall integrity of the flotation unit and preventing substrate contact, thus resolving the gas stagnation issue without compromising flotation accuracy.
2Reliability
If gas is continuously ejected to maintain substrate flotation, then the substrate remains elevated, but energy consumption increases and gas waste occurs
Solution Approach 1:
By providing escape paths through the slits, the system extracts excess gas that would otherwise stagnate and require continuous ejection. This allows the flotation system to operate more efficiently with reduced gas consumption while maintaining stable substrate flotation.
Solution Approach 2:
The slits enable the system to self-regulate gas pressure by allowing trapped gas to escape automatically. This self-service mechanism reduces the need for continuous active gas ejection, thereby reducing energy consumption and gas waste while maintaining flotation stability.
3Ease of manufacture
If the flotation unit structure is simplified without slits, then manufacturing is easier, but flotation accuracy deteriorates due to gas accumulation
Solution Approach 1:
The slits provide a simple porous structure that is easy to manufacture (through drilling, machining, or forming) while effectively solving the gas accumulation problem. This maintains manufacturing simplicity without compromising flotation accuracy, as the slits are straightforward structural features rather than complex components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively enhances flotation accuracy by preventing the formation of air reservoirs, reducing substrate contact with the conveyance apparatus, and simplifying the system by eliminating the need for separate suction means, thereby ensuring consistent and precise substrate conveyance.
Implementation Method 1
a flotation unit 5 for floating a substrate 30 by ejecting gas to a lower surface of the substrate 30
Implementation Method 2
the gas staying between a surface of the flotation unit 5 facing the substrate 30 and the substrate 30 is discharged to a lower surface side of the flotation unit 5 through slits 50
Data Source
AI summary
A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.