Flow Aperture Inspection Fixture Using Backpressure and Optical Imaging

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Solution Overview

Problem

Existing fluid systems face challenges in efficiently inspecting flow control devices for blockages and dimensional accuracy, which can affect fluid flow properties, and current inspection methods add significant cost and time to the fabrication or cleaning processes.

Innovation Solution

An inspection fixture and system that includes a seat, backpressure sensor, and optical focal plane array to measure backpressure and optical image data of flow apertures, allowing for precise determination of flow area and conductance, with optional features like fluid conduits, light sources, and calibration blocks for enhanced accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional inspection methods are used to inspect flow control devices, then measurement precision can be achieved, but loss of time and productivity decrease significantly

Engineering Contradiction:
Improveinspection accuracyVSAvoidfabrication and cleaning process efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent combines backpressure sensing and optical imaging inspection methods into a single integrated inspection fixture. The fixture simultaneously measures backpressure through fluid flow and captures optical images of flow apertures, allowing both inspection functions to be performed concurrently rather than sequentially, thereby reducing total inspection time while maintaining measurement precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The inspection fixture is designed as a multi-functional device that can inspect multiple flow apertures simultaneously using both backpressure sensing and optical imaging. The fixture can accommodate different workpiece configurations and inspect various flow aperture types through a single universal platform, improving productivity across different inspection scenarios without requiring separate specialized equipment for each inspection type.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If comprehensive inspection of flow apertures is performed, then manufacturing precision is improved, but loss of time increases

Engineering Contradiction:
Improveflow aperture sizing accuracyVSAvoidinspection time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system performs preliminary backpressure sensing to identify flow apertures that may require closer optical inspection. By first measuring backpressure and comparing it against expected values, the system can prioritize which flow apertures need detailed optical imaging, potentially reducing the total inspection time by focusing optical resources only on apertures that show anomalies or are critical to manufacturing precision.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The inspection system can be configured to inspect only the most critical flow apertures or use sampling methods where optical imaging is applied selectively rather than to every single aperture. This partial inspection approach maintains manufacturing precision for critical components while significantly reducing overall inspection time compared to comprehensive inspection of all flow apertures.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides efficient and cost-effective inspection of flow apertures, ensuring accurate sizing and dimensioning, thereby maintaining fluid flow integrity and reducing the risk of blockages in fluid systems.

Implementation Method 1

The backpressure sensor is coupled to seat to acquire backpressure of a fluid traversing one of a first flow aperture and a second flow aperture defined in the workpiece supported on the seat of the inspection fixture

Methodology Applied
Scientific EffectBackpressure measurement:

Implementation Method 2

The optical focal plane array is also coupled to the seat to acquire optical image data of a portion of the workpiece including one or more of the first flow aperture and the second flow aperture defined in the workpiece supported on the seat of the inspection fixture

Methodology Applied
Scientific EffectOptical imaging:

Data Source

PatentUS20250362202A1Inspection fixtures, inspection systems, inspection methods, and computer program products for inspecting workpieces using inspection fixtures and inspection systems
Publication Date: 2025.11.27 ASM IP HLDG BV
  • US20250362202A1 patent drawing
  • US20250362202A1 patent drawing
  • US20250362202A1 patent drawing

AI summary

An inspection fixture includes a seat to support a workpiece, a backpressure sensor and a focal plane array. The backpressure sensor is coupled to seat to acquire backpressure of a fluid traversing one of a first flow aperture and a second flow aperture defined in the workpiece supported on the seat of the inspection fixture. The optical focal plane array is also coupled to the seat to acquire optical image data of a portion of the workpiece including one or more of the first flow aperture and the second flow aperture defined in the workpiece supported on the seat of the inspection fixture. Inspection systems, inspection methods, and computer program products for inspecting workpieces are also described.