Die-Level Flow Cell Channel Layout for Precise Pixel Coverage
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Solution Overview
Problem
Current methods for fabricating flow cells are inefficient as they often require complex molding processes and do not allow for precise control over the shape of the fluidic flow channel, which can lead to improper coverage of the pixel area and reduced pixel availability, and are not suitable for applications like sequencing-by-synthesis or cyclic-array sequencing.
Innovation Solution
A method involving the placement of a die in a substrate cavity with exposed electrical contacts, forming fluidics fan-out regions, and attaching a lid to create a fluidic flow channel over the active surface of the die, allowing for individual fabrication of flow cells with a specific shape suitable for various sensor systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If complex molding processes are used to fabricate flow cells, then the fluidic flow channel can be formed, but the manufacturing complexity increases and precision control over channel shape is reduced
Solution Approach 1:
The flow cell fabrication is divided into separate stages: first placing the die with active surface in a cavity, then forming the fluidic flow channel in a second step by attaching a lid. This segmentation allows precise control of the channel shape between the die and lid without requiring complex molding processes for the entire structure.
Solution Approach 2:
The die is placed in the cavity with its active surface positioned to define the future fluidic flow channel shape before the lid is attached. This preliminary positioning establishes the precise channel geometry early in the process, enabling controlled reactions and proper pixel area coverage without subsequent complex adjustments.
2Area of stationary object
If the fluidic flow channel shape is not precisely controlled, then fabrication is simpler, but pixel area coverage is improper and pixel availability is reduced
Solution Approach 1:
The active surface of the die provides a locally optimized region with precise geometric features that define the fluidic flow channel shape. This local quality ensures proper coverage of the pixel area while maintaining the simplicity of the overall fabrication process by not requiring complex molding throughout the entire structure.
3Manufacturing precision
If individual die fabrication is used instead of wafer-level fabrication, then control over fluidic flow channel formation is improved, but fabrication time increases
Solution Approach 1:
The fabrication process is segmented into two main steps: placing multiple dies in cavities (which can be done in parallel) and then forming fluidic flow channels by attaching lids. This segmentation enables individual control over each flow cell's channel formation while maintaining reasonable throughput through parallel processing of multiple dies.
Data Source
AI summary
Provided herein include various examples of an apparatus, a sensor system and examples of a method for manufacturing aspects of an apparatus, a sensor system. The apparatus may include a die. The apparatus may also include a substrate comprising a cavity. The die may be oriented in a portion of the cavity in the substrate, where the orientation defines a first space in the cavity adjacent to a first edge of the upper surface of the die and a second space in the cavity adjacent to the second edge of the upper surface of the die. The apparatus may further include fluidics fan-out regions comprising a first cured material deposited in the first space and the second space, a surface of the fluidics fan-out regions being contiguous with the upper surface of the die.