Flow Cell Package Surface Modification via Silane Polishing

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Solution Overview

Problem

Current biological array technologies face challenges in efficiently forming surface-modified patterned wafers for use in flow cell packages, particularly in creating functionalized molecules and primer grafting processes that maintain stability and reproducibility for biological applications such as genetic sequencing.

Innovation Solution

The method involves forming surface-modified patterned wafers by attaching silanes or silane derivatives to patterned wafers with depressions, forming a coating layer of functionalized molecules, polishing the interstitial regions, and grafting primers to the depressions, followed by bonding these wafers together with a spacer layer to create fluidic chambers suitable for biological applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If silane or silane derivative is attached to the surface of patterned wafer to form silanized depressions and silanized interstitial regions, then the surface chemistry stability is improved, but the manufacturing complexity increases

Engineering Contradiction:
Improvesurface chemistry stabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The silane attachment step is performed as a preliminary action before forming the coating layer. By pre-silanizing the wafer surface in depressions and interstitial regions, the subsequent coating process benefits from enhanced surface chemistry stability without requiring complex in-process adjustments during coating formation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes chemical parameter changes by introducing silane derivatives that modify the surface properties of the patterned wafer. This chemical modification creates a stable silanized surface that maintains composition stability during subsequent processing steps, resolving the contradiction between stability and manufacturing complexity.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If coating layer of functionalized molecule is formed in silanized depressions and on silanized interstitial regions, then the functionalization quality is improved, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvefunctionalization qualityVSAvoidmanufacturing precision requirements
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The silane attachment serves as a preliminary action that prepares the surface with controlled chemical properties. This pre-preparation creates distinct silanized regions (depressions and interstitial regions) that guide subsequent coating formation, improving functionalization quality while reducing the need for high-precision control during the coating step itself.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies local quality by creating different silanized regions (depressions vs. interstitial regions) with potentially different properties. This allows the coating layer to be formed with enhanced functionalization quality in specific locations, as the local silane chemistry provides tailored surface characteristics for optimal coating adhesion and functionality.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If coating layer is polished from silanized interstitial regions, then the surface finish quality is improved, but the loss of substance increases

Engineering Contradiction:
Improvesurface finish qualityVSAvoidcoating material loss
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The polishing process selectively removes coating material from silanized interstitial regions while preserving the coating in silanized depressions. This local differentiation is enabled by the underlying silane chemistry, which creates regions with different adhesion and removal characteristics, allowing precise surface finish control with minimized overall material loss.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The silane layer acts as an intermediary between the patterned wafer and the coating layer. During polishing, the silane-modified interstitial regions provide a controlled interface that facilitates selective coating removal, enabling surface finish quality improvement while the silane layer protects against excessive coating material loss through its mediating chemical properties.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Adaptability or versatility

If primer is grafted to coating layer in silanized depressions to form functionalized depressions, then the biological array functionality is improved, but the manufacturing complexity increases

Engineering Contradiction:
Improvebiological array functionalityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The primer grafting is performed as a preliminary action on the silanized depressions before wafer bonding. By pre-functionalizing the depressions with primers that are chemically anchored to the silane layer, the subsequent bonding and biological array formation processes benefit from enhanced functionality without requiring complex in-process primer attachment steps.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent creates a composite structure combining the patterned wafer, silane layer, coating layer, and grafted primer. This multi-layer composite provides enhanced biological array functionality through the synergistic properties of each layer, while the modular composite structure allows standardized manufacturing procedures that manage complexity.

Inventive Principle:
Principle #40Composite materials

5Shape

If two surface-modified patterned wafers are bonded together with spacer layer, then the flow cell package structure is improved, but the manufacturing complexity increases

Engineering Contradiction:
Improveflow cell package structureVSAvoidmanufacturing complexity
Core Design Contradiction:
ShapeVSDevice complexity

Solution Approach 1:

The spacer layer is positioned and bonded as a preliminary action before final assembly. By pre-establishing the spacer layer between the two surface-modified wafers, the complex flow cell package structure is built incrementally, allowing each wafer and the spacer to be optimized independently while simplifying the overall assembly process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of stable and reproducible surface-modified wafers that can be used in flow cell packages, enhancing their suitability for biological applications like genetic sequencing by maintaining the integrity of the surface chemistry and allowing for high-volume assembly and quality control.

Implementation Method 1

a silane or a silane derivative is attached to a surface of a patterned wafer including depressions separated by interstitial regions to form silanized depressions and silanized interstitial regions

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 2

A coating layer of a functionalized molecule is formed in the silanized depressions and on the silanized interstitial regions

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Implementation Method 3

The coating layer is polished from the silanized interstitial regions using i) a basic, aqueous slurry having a pH ranging from about 7.5 to about 11 and including an abrasive particle

Methodology Applied
Scientific EffectAbrasion: Abrasion

Implementation Method 4

A primer is grafted to the coating layer in the silanized depressions to form functionalized depressions

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 5

two of the surface-modified patterned wafers are bonded together with a spacer layer therebetween

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS11846580B2Flow cell package and method for making the same
Publication Date: 2023.12.19 ILLUMINA INC
  • US11846580B2 patent drawing
  • US11846580B2 patent drawing
  • US11846580B2 patent drawing

AI summary

A flow cell package includes first and second surface-modified patterned wafers and a spacer layer. The first surface-modified patterned wafer includes first depressions separated by first interstitial regions, a first functionalized molecule bound to a first silane or silane derivative in at least some of the first depressions, and a first primer grafted to the first functionalized molecule in the at least some of the first depressions. The second surface-modified patterned wafer includes second depressions separated by second interstitial regions, a second functionalized molecule bound to a second silane or silane derivative in at least some of the second depressions, and a second primer grafted to the second functionalized molecule in the at least some of the second depressions. The spacer layer bonds at least some first interstitial regions to at least some second interstitial regions, and at least partially defines respective fluidic chambers of the flow cell package.