Flow Controller Expansion Chamber for Pressure Oscillation
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Solution Overview
Problem
Conventional flow controllers face challenges in suppressing pressure oscillations, especially for high-flow fluids, due to limited space in downsized semiconductor devices and the inefficacy of existing chambers and distribution plates in reducing pressure fluctuations, which also complicates maintenance and assembly.
Innovation Solution
The flow controller incorporates an expansion chamber positioned downstream of the control valve with a second flow passage not on the same axis, combined with a distribution plate and retainer system, to effectively reduce pressure oscillations and facilitate maintenance by allowing fluid diffusion and increased volume without increasing device dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a chamber is provided in the middle of a pipe to suppress pressure fluctuation, then pressure oscillation is reduced, but the device volume increases and cannot handle high-flow fluids effectively
Solution Approach 1:
The patent positions the second flow passage at a location not on the extension of the first flow passage, creating a spatial arrangement that allows the expansion chamber to suppress pressure oscillations without requiring additional device volume. This dimensional repositioning enables the chamber to effectively diffuse high-flow fluids while maintaining compact device dimensions.
2Object-affected harmful factors
If the chamber volume is increased to suppress pressure fluctuation for high-flow fluids, then pressure oscillation suppression is improved, but the device dimensions increase
Solution Approach 1:
By positioning the second flow passage outlet at a location not on the extension of the first flow passage, the patent creates an expanded effective volume within the same device footprint. This spatial arrangement allows the expansion chamber to handle high-flow fluids and suppress pressure fluctuations without increasing overall device dimensions.
3Object-affected harmful factors
If a distribution plate is interposed in the flow passage to distribute gas flow, then pressure oscillation is reduced, but pressure drop increases
Solution Approach 1:
The expansion chamber acts as an intermediary between the first and second flow passages, providing a space for fluid diffusion and pressure oscillation suppression without the need for a distribution plate. This intermediary chamber reduces pressure oscillations while maintaining smooth flow transitions, avoiding the pressure drop penalties associated with distribution plates.
4Reliability
If software measures are used to suppress hunting by changing computation coefficients, then flow control stability is improved, but the optimum coefficient value is difficult to determine
Solution Approach 1:
The patent extracts the pressure oscillation suppression function from the control system software and implements it mechanically through the expansion chamber and spatial repositioning. This extraction eliminates the need for complex coefficient optimization while maintaining flow control stability, as the mechanical structure inherently dampens pressure fluctuations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration collectively reduces pressure oscillations, ensures effective suppression of fluctuations even for high-flow fluids, enhances maintainability by allowing easy replacement of components without disassembling connected pipes, and prevents pressure drop increases.
Implementation Method 1
a flow controller including: a control valve; a first flow passage provided on a downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage
Implementation Method 2
a technique in which a distribution plate having a flow straightening effect, such as a metal mesh plate or an orifice plate, is interposed in a flow passage to distribute a gas flow
Data Source
AI summary
The flow controller according to the present invention includes: a control valve; a first flow passage provided on the downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage. The second flow passage is provided in a position that is not on the extension of the first flow passage.