Flow Rate Controller Inspection Using 3D Piezo Valve Reference Data
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Solution Overview
Problem
Existing flow rate control devices lack a method to inspect and account for individual differences in flow rate controllers, leading to potential deviations from set values due to use period, frequency, and environment, and do not allow for inspection without stopping the apparatus, affecting availability.
Innovation Solution
A method and apparatus for inspecting flow rate controllers using a first pressure detector, a diaphragm valve with a piezoelectric element, and a second pressure detector, creating a three-dimensional database of control values for the piezoelectric element based on reference measurements, and comparing target data during substrate processing to determine valve functionality and detect abnormalities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If flow rate control devices are used without inspection methods, then the apparatus can operate continuously, but individual differences and deviations from set values accumulate over time, affecting reliability
Solution Approach 1:
The inspection method performs measurements and creates reference data before the substrate processing process begins. By establishing the three-dimensional database in advance with control values corresponding to different first pressures and set flow rates, the system prepares inspection criteria without interrupting the main process flow.
Solution Approach 2:
The invention creates a three-dimensional database that stores reference control values as a digital copy of the expected system behavior under various conditions. This virtual reference model allows comparison with actual operational data without requiring physical reference standards or additional hardware.
2Measurement precision
If traditional inspection methods are used that require stopping the apparatus, then measurement accuracy can be ensured, but apparatus availability decreases
Solution Approach 1:
The inspection method enables continuous monitoring by measuring control values during the substrate processing process without interruption. The system continuously compares actual control values against the three-dimensional database reference data, maintaining both measurement accuracy and process continuity simultaneously.
Solution Approach 2:
The invention implements a feedback mechanism where control values are measured during operation and compared against reference data stored in the three-dimensional database. This continuous feedback loop allows real-time detection of deviations while the apparatus remains operational, eliminating the need to stop for inspection.
3Reliability
If flow rate controllers are inspected frequently to maintain accuracy, then reliability improves, but loss of time due to repeated inspections increases
Solution Approach 1:
The three-dimensional database is created in advance with comprehensive reference data covering various first pressure conditions and set flow rates. This preliminary preparation eliminates the need for repeated inspection setups, as all reference values are pre-calculated and stored for immediate comparison during operation.
Solution Approach 2:
The three-dimensional database serves multiple functions: it stores reference control values for inspection, provides calibration data for different operating conditions, and enables prediction of optimal control values. This single database structure replaces multiple separate inspection procedures, reducing total inspection time while maintaining comprehensive coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous monitoring and inspection of flow rate control functions, accounting for individual differences and ensuring the flow rate controllers maintain set values without stopping the apparatus, thereby improving availability and reliability.
Implementation Method 1
a diaphragm valve provided downstream of the first pressure detector and having a diaphragm and a piezoelectric element for driving the diaphragm
Data Source
AI summary
The method for inspecting the flow rate controller for controlling a flow rate of a fluid includes creating and recording a three-dimensional database in which a first pressure, a set flow rate or a second pressure, and a control value of a piezoelectric element are associated with each other, based on reference data, measuring, as target data, control values of the piezoelectric element corresponding to the first pressure detected by a first pressure detector and the set flow rate specified in a recipe of a substrate processing process or the second pressure detected by a second pressure detector, at the time of the execution of the substrate processing process, and determining whether or not there is a problem in a diaphragm valve, by comparing the target data with the reference data included in the three-dimensional database.