Flow Directing Gasket for Electron Microscope Sample Hydration Control
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Solution Overview
Problem
Current electron microscope sample holders face challenges such as evaporation of liquids due to electron beam heating, asymmetry issues during assembly, difficulty in maintaining desired surface energy, high flow rates leading to potential over-pressurization, and inability to quantify fluid ratios, which affect the precision and safety of fluid flow across semiconductor devices.
Innovation Solution
The introduction of flow directing gaskets with a first and second enclosed area, where the second area is smaller, and at least one arm member attached to both gaskets, ensuring fluid flow between MEMS chips while maintaining safe pressures and providing a known flow volume, addresses these issues by directing fluid flow across the sample holder's membranes rather than around them.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high flow rates are used to prevent evaporation and maintain sample hydration, then sample hydration is improved, but over-pressurization and safety risks increase
Solution Approach 1:
The gasket design changes the flow parameters by creating a restricted flow path with specific enclosed areas, transforming the fluid dynamics from high-flow/high-pressure to controlled low-flow/low-pressure operation while maintaining effective sample hydration
Solution Approach 2:
The gasket acts as an intermediary flow control element between the fluid source and the sample environment, mediating the pressure and flow rate to achieve safe operation conditions
2Ease of operation
If fluid flow is allowed around the semiconductor devices, then ease of assembly is improved, but fluid ratio quantification becomes impossible
Solution Approach 1:
The gasket design creates different flow zones with specific enclosed areas, where the first and second enclosed areas define distinct regions that control and quantify fluid distribution to the sample
Solution Approach 2:
The gasket segments the fluid flow path into defined enclosed areas, creating discrete flow channels that enable precise control and measurement of fluid ratios while maintaining assembly simplicity
3Device complexity
If flow paths are not restricted, then device complexity is reduced, but evaporation control and flow precision deteriorate
Solution Approach 1:
The gasket utilizes flexible sealing structures with defined enclosed areas that control fluid flow paths without requiring complex rigid flow control mechanisms, achieving evaporation control through elastic sealing
Solution Approach 2:
The gasket design enables self-regulating flow control where the enclosed areas and sealing properties automatically control fluid distribution and pressure without external intervention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces evaporation, maintains safe pressures, improves fluid ratio quantification, and enhances the safety and precision of fluid flow, allowing for more controlled and accurate imaging in electron microscopes.
Implementation Method 1
a pump located external to the sample holder can be used to force liquids into the cavity at the tip of the holder... any method of creating a pressure differential could be used to establish flow
Implementation Method 2
devices, e.g., semiconductor devices, which are designed with relatively thin electron beam transparent membranes, positioned in the cavity at the tip of the holder
Implementation Method 3
To maintain an ultra-high vacuum environment inside the electron microscope, flexible o-rings are typically found along the barrel of the sample holder, and these o-rings seal against the microscope
Data Source
AI summary
A support for an electron microscope sample includes a body defining a void for receiving a first micro-electronic device, and a first gasket positioned about the first surface. The first gasket further defines an arm extending at an angle away from a horizontal extending through the first micro-electronic device. In operation, the first micro-electronic device is installed onto the first gasket and the arm engages an outer facing side of the first micro-electronic device to grip the first micro-electronic device.