Flow Divider Layout for Bubble Separation in Processing Liquid

Solution Overview

Problem

Existing liquid processing systems struggle to effectively reduce bubbles in processing liquids, which can lead to operational instability and particle generation in processing devices.

Innovation Solution

A flow divider is introduced, featuring a guide flow path with a first outlet located above a second outlet. This design ensures that bubbles flowing out through the second outlet have a smaller volume than those flowing out through the first outlet, effectively reducing bubble volume in the processing liquid.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional circulation system is used without a flow divider, then the liquid circulation is simple and device complexity is low, but bubble volume in the processing liquid remains high causing operational instability

Engineering Contradiction:

Improveoperational stabilityVSAvoidsystem structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The flow divider main body is divided into multiple guide flow paths (first guide flow path and second guide flow path) with different configurations. Each guide flow path has specific inlet and outlet arrangements that segment the liquid flow, allowing bubbles to be separated and removed from the processing liquid before circulation, thereby improving operational stability without requiring complete system redesign

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The flow divider acts as an intermediary device placed within the circulation system to mediate between the pump and the processing chambers. It introduces a gas-liquid separation function without disrupting the overall circulation architecture, adding reliability while maintaining relatively simple integration

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If bubbles are not removed from processing liquid, then the system operates continuously without additional components, but particle generation increases reducing manufacturing precision

Engineering Contradiction:

Improveparticle generation controlVSAvoidflow divider structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The flow divider main body is divided into multiple guide flow paths (first guide flow path and second guide flow path) with different configurations. Each guide flow path has specific inlet and outlet arrangements that segment the liquid flow, allowing bubbles to be separated and removed from the processing liquid before circulation, thereby improving operational stability without requiring complete system redesign

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The flow divider acts as an intermediary device placed within the circulation system to mediate between the pump and the processing chambers. It introduces a gas-liquid separation function without disrupting the overall circulation architecture, adding reliability while maintaining relatively simple integration

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The flow divider significantly reduces bubble volume in the processing liquid, enhancing the operational stability of the circulation pump and improving the quality of the processing liquid supplied to processing devices by minimizing particle generation.

Implementation Method 1

When a bubble exists in the liquid within the guide flow path, a volume of the bubble flowing out to the outside along with the liquid through the second outlet is smaller than a volume of the bubble flowing out to the outside along with the liquid through the first outlet

Methodology Applied

Scientific EffectBuoyancy: Archimedes' Principle (Buoyancy)

Data Source

PatentUS20250067350A1Flow divider and liquid processing system

Publication Date: 2025.02.27 TOKYO ELECTRON LTD

AI summary

A flow divider includes a flow divider main body having a guide flow path; an inlet through which a liquid is guided into the guide flow path; and a first outlet and a second outlet through which the liquid is discharged to an outside from the guide flow path. The first outlet is located above the second outlet, and when a bubble exists in the liquid within the guide flow path, a volume of the bubble flowing out to the outside along with the liquid through the second outlet is smaller than a volume of the bubble flowing out to the outside along with the liquid through the first outlet.