Flow Guidance Parts for Non-Immersive Substrate Wetting

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Solution Overview

Problem

Existing devices for non-immersive wet-chemical treatment of substrates struggle to ensure that the treatment solution effectively reaches the upper edge of the substrate, especially when the clamping devices engage the substrate at a distance from the upper edge, which can be problematic for thin or fragile substrates.

Innovation Solution

The device incorporates a support structure with a clamping mechanism featuring a series of projections that engage the substrate's major surface, along with inner and outer flow guidance parts. The inner flow guidance part has a wettable surface section and a sloping section that directs liquid towards the substrate's upper edge, while the outer flow guidance part ensures that the liquid flows onto the substrate even when the clamping devices are positioned away from the upper edge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the clamping devices engage the substrate at a distance from the upper edge, then the substrate is held more securely without risk of damage, but the treatment solution cannot reach the upper edge of the substrate

Engineering Contradiction:
Improvesubstrate holding securityVSAvoidtreatment solution coverage
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The flow guidance part acts as an intermediary element that redirects the treatment solution flow from the clamping device region toward the upper edge of the substrate. It mediates between the clamping device engagement point and the substrate upper edge, ensuring the solution reaches areas that would otherwise be inaccessible when clamping away from the edge.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The flow guidance part introduces a spatial dimension change by redirecting the solution flow path. Instead of relying on direct downward flow or upward flow over the substrate surface, the flow guidance part creates a redirected path that reaches the upper edge from the clamping region, effectively using spatial redirection to solve the coverage problem.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If the treatment solution flows upwards over the substrate surface to reach the upper edge, then complete coverage is achieved, but the flow may detach and leave the upper edge untreated

Engineering Contradiction:
Improvetreatment solution coverageVSAvoidflow attachment stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The flow guidance part serves as a mediator that eliminates the need for the solution to flow upwards over the substrate surface. It provides an alternative path that delivers the solution directly to the upper edge region, preventing flow detachment while ensuring complete coverage.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If the clamping devices are positioned close to the upper edge, then the treatment solution can reach the upper edge more easily, but thin or fragile substrates may be damaged or deformed

Engineering Contradiction:
Improvetreatment solution coverageVSAvoidsubstrate structural integrity
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The flow guidance part acts as an intermediary that decouples the clamping position from the solution coverage. It allows the clamping devices to be positioned away from the upper edge for substrate protection while simultaneously ensuring the solution reaches the upper edge through redirected flow, resolving the conflict between substrate integrity and treatment coverage.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Manufacturing precision

If the flow guidance part redirects liquid towards the substrate upper edge, then complete wetting is achieved, but the device complexity increases

Engineering Contradiction:
Improvesubstrate wetting uniformityVSAvoidflow guidance structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The flow guidance part is implemented as a localized feature on the clamping device rather than a complex system-wide modification. By concentrating the flow redirection function in a specific local structure, the patent achieves complete substrate wetting while minimizing the overall device complexity increase.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for effective wetting of the substrate up to its upper edge, even when the clamping devices are not directly engaged at that edge, thereby ensuring uniform treatment without relying on the liquid to flow upwards over the substrate's surface.

Implementation Method 1

an inner flow guidance part having an outward-facing surface facing outwards with respect to the plane and comprising a wettable surface section wettable by a stream of liquid directed onto the wettable surface section

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

a wettable surface section wettable by a stream of liquid

Methodology Applied
Scientific EffectSurface tension: Surface Tension

Implementation Method 3

a sloping surface section, wherein the inward-facing surface of the outer flow guidance part is spaced apart from the outward-facing surface of the inner flow guidance part to enable liquid directed onto the wettable surface section to flow onto at least the sloping section

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentEP4541937A1Apparatus for non-immersive wet-chemical treatment of a planar substrate, device for holding the substrate and system for transporting the substrate
Publication Date: 2025.04.23 ATOTECH DEUT GMBH & CO KG
  • EP4541937A1 patent drawingFigure 1
  • EP4541937A1 patent drawingFigure 2
  • EP4541937A1 patent drawingFigure 3~4

AI summary

A device for holding a planar substrate (2) in an apparatus for non-immersive wet-chemical treatment of the substrate (2) comprises a support structure (4) comprising at least one part (5a,b,6) for engaging a support such as to hold the support structure (4) in the apparatus and at least one clamping device (10), supported by the support structure (4), for holding the substrate (2) in a plane (3). The at least one clamping devices (10) comprise at least one laterally progressing series of projections (12a-s) for engaging a major surface of a substrate (2) located in the plane (3) proximal an upper edge of the substrate (2). The device further comprises: at least one inner flow guidance part (21), having an outward-facing surface facing outwards with respect to the plane (3) and comprising a wettable surface section (25) wettable by a stream of liquid directed onto the wettable surface section (25); and at least one outer flow guidance part (23), having an inward-facing surface, wherein the inward-facing surface faces inwards with respect to the plane (3) and comprises a sloping surface section (35). The inward-facing surface of the outer flow guidance part (23) is spaced apart from the outward-facing surface of the inner flow guidance part (21) to enable liquid directed onto the wettable surface section (25) to flow onto at least the sloping section (35) of the inward-facing surface of the outer flow guidance part (23). Seen looking onto the plane (3), an edge (29) of the inner flow guidance part (21) proximal the series of projections (12a-s) and extending at least predominantly in the lateral direction is located between the series of projections (12a-s) and the wettable surface section (25), and the sloping section (35) of the inward-facing surface of the outer flow guidance (23) part slopes towards the plane (3) in a direction (-z) transverse to the lateral direction (x) and towards the series of projections (12a-s).