Flow Guide Device for Dual-Electrode Excimer Laser
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Solution Overview
Problem
Conventional dual-electrode excimer lasers face challenges in maintaining a symmetrical flow field distribution and achieving consistent high-speed gas flow uniformity between discharge regions, which affects discharge quality and laser reliability, especially at high repetition rates.
Innovation Solution
A gas excimer laser discharge cavity design featuring rotors with opposite rotation directions, symmetrically installed flow guide devices, including cambered spoiler plates and confluent flow guide plates, creates a symmetrical flow field and accelerates gas flow uniformly across both discharge regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If two pairs of electrodes are installed in parallel in a discharge cavity to simplify the excimer laser structure and enable synchronous control, then device complexity is reduced, but it becomes difficult to maintain symmetrical flow field distribution and achieve uniform high-speed gas flow between the discharge regions
Solution Approach 1:
The gas circulation system is segmented into multiple independent components: rotors for gas circulation, spoiler plates for flow direction control, and flow guide plates for flow distribution. Each component performs a specific function to collectively achieve uniform gas flow across both discharge regions while maintaining structural simplicity.
Solution Approach 2:
The spoiler plates are designed with asymmetric angled surfaces that strategically direct gas flow to compensate for the symmetric electrode configuration. This asymmetric flow guidance ensures uniform gas distribution between the two discharge regions, resolving the flow field asymmetry problem caused by parallel electrode installation.
2Reliability
If high speed gas flow is generated between discharge electrodes to carry away exhaust gas and supply fresh working gas, then discharge quality and laser reliability are improved, but it becomes challenging to maintain consistent flow velocity and uniformity across different discharge regions
Solution Approach 1:
The flow guide plates are positioned to receive and redistribute gas flow in a feedback manner, capturing high-speed flow from one region and redirecting it to areas needing supplementation. This passive feedback mechanism automatically balances flow velocity and uniformity across both discharge regions without requiring active control.
Solution Approach 2:
The gas flow control extends into the vertical dimension with flow guide plates positioned at different heights and angled surfaces that redirect flow in three-dimensional space. This multi-dimensional flow management ensures uniform gas distribution across the discharge regions by utilizing vertical flow components to supplement horizontal flow uniformity.
3Productivity
If rotors are used to drive gas flow in the cavity, then gas circulation is achieved, but it becomes difficult to form a symmetrical flow field distribution and uniform high-speed gas flow in the discharge region
Solution Approach 1:
Two rotors are installed in opposite positions and rotate in opposite directions, creating counterbalancing flow patterns. This counterweight arrangement generates symmetrical flow fields that compensate for individual rotor asymmetries, achieving uniform high-speed gas flow across both discharge regions while maintaining overall flow field symmetry.
Solution Approach 2:
Spoiler plates and flow guide plates are strategically positioned in specific locations to locally adjust and optimize flow characteristics. These localized flow control elements ensure that each discharge region receives appropriately directed and velocity-matched gas flow, maintaining flow field symmetry and uniformity across the entire cavity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures uniform high-speed gas flows in both discharge regions, enhancing discharge quality and reliability of the excimer laser by reducing flow resistance and energy loss, thus improving overall laser performance.
Implementation Method 1
two rotors for passing flow are installed at both sides of the cavity... The two rotors are rotated in opposite directions
Implementation Method 2
A series of flow guide arrangements are provided around the rotors in the cavity to form an interval channel which is in favor of forming of the gas flow and acceleration of the gas flow
Implementation Method 3
it needs to form a high speed gas flow between the discharge electrodes so as to carry away exhaust gas which has been discharged and to continuously supply fresh working gas for discharge
Implementation Method 4
two pairs of discharge electrodes are installed in parallel in one discharge cavity; one pair of the electrodes is configured to generate a seed light and the other pair of the electrodes is configured to amplify the seed light
Data Source
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AI summary
The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.