Cleaning Quality Control Using Electromagnetic Flow Meter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor wafer manufacturing, it is challenging to automatically determine the cleaning quality and efficiently control the amount of pure water used, as existing methods require significant water consumption and manual quality determination due to varying treatment conditions and chemical concentrations.
Innovation Solution
A cleaning quality control system utilizing an electromagnetic flow meter with an S/N ratio measuring unit and a pre-corresponded S/N ratio•electric conductivity determining table, allowing for continuous monitoring of detergent drain conductivity without direct conductivity measurements, and automatically determining cleaning completion based on predetermined thresholds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If traditional cleaning quality control methods are used, then cleaning quality can be determined, but large amounts of pure water are consumed and manual determination is required
Solution Approach 1:
The patent replaces manual conductivity measurement methods with an electromagnetic flow meter that automatically measures both flow rate and cleaning quality. The flow meter's detection unit substitutes for manual testing by continuously monitoring detergent drain conductivity and automatically determining cleaning completion based on predetermined thresholds.
Solution Approach 2:
The cleaning system performs self-quality control by using the electromagnetic flow meter to automatically measure the conductivity of detergent drain and determine when cleaning is complete. The system serves itself by eliminating the need for external manual testing and automatically controlling the cleaning process based on real-time measurements.
2Adaptability or versatility
If multiple cleaning tanks with different treatment conditions are used, then cleaning flexibility is improved, but automatic quality judgment becomes difficult
Solution Approach 1:
The electromagnetic flow meter serves multiple functions: it measures flow rate, determines cleaning quality through conductivity measurement, and automatically controls the cleaning process. This multi-functional device can be applied across different cleaning tanks and treatment conditions, providing universal quality control capability regardless of specific cleaning parameters.
3Measurement precision
If continuous monitoring of detergent drain conductivity is performed, then cleaning quality is accurately determined, but measurement complexity increases
Solution Approach 1:
The patent merges the flow rate measurement function and cleaning quality measurement function into a single electromagnetic flow meter device. By combining these two measurement capabilities in one instrument, the system achieves continuous monitoring of both parameters without increasing overall system complexity or requiring separate measurement devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and automatic determination of cleaning quality, reducing pure water consumption and improving manufacturing time by continuously monitoring detergent drain conductivity and switching between wetted and non-wetted type flow meters for comprehensive quality control.
Implementation Method 1
An electromagnetic flow meter is a device to measure a flow rate of fluid having electric conductivity
Implementation Method 2
an S/N ratio measuring unit to measure an S/N ratio of a detection signal of the electromagnetic flow meter
Data Source
AI summary
A cleaning quality control device to automatically determine cleaning quality as to whether or not cleaning has been completed from a detection signal of the electromagnetic flow meter,the cleaning quality control device includes, an S/N ratio measuring unit to measure an S/N ratio of the detection signal, and a cleaning completion determining unit which is provided with an S/N ratio•electric conductivity determining table in which outputs of the S/N ratio measuring unit and respective electric conductivities of detergent drains are previously made correspondent using the detergent drains with predetermined electric conductivities, and which outputs cleaning completion when an obtained electric conductivity thereof becomes not more than a predetermined electric conductivity, andobtains the electric conductivity of the detergent drain from a value of the S/N ratio of the electromagnetic flow meter, and thereby automatically determines the cleaning quality as to whether or not cleaning has been completed.