Thermal Mass Flow Meter Sensor Wire Pulse Signal Control

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Solution Overview

Problem

Thermal type mass flow meters face challenges in balancing heat generation from sensor wires with measurement accuracy, as reducing heat generation can lead to decreased accuracy and increasing it can worsen associated problems like thermal syphoning and fluid deterioration.

Innovation Solution

A method involving the use of pulse signals with varying intensities for heat generation in sensor wires, instead of traditional DC electric voltage, to maintain signal intensity while reducing energy consumption and heat generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If DC electric voltage is applied to sensor wires to generate heat, then measurement accuracy is maintained, but heat generation causes thermal syphoning and fluid deterioration

Engineering Contradiction:
Improveflow rate measurement accuracyVSAvoidthermal syphoning and fluid deterioration
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent applies periodic pulse signals instead of continuous DC voltage to the sensor wires. The pulse signal has a width of 100 μs or less and repeats at a frequency of 1 kHz or higher, creating periodic heating cycles that allow the system to maintain measurement accuracy while reducing cumulative heat generation and its associated harmful effects like thermal syphoning and fluid deterioration.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent changes the electrical parameters by using high-frequency pulse signals with specific duty cycles instead of continuous DC voltage. This parameter transformation allows the sensor wires to generate sufficient heat for accurate measurement during the pulse duration while the average power input is reduced, thereby minimizing thermal syphoning and fluid deterioration effects.

Inventive Principle:
Principle #35Parameter changes

2Object-generated harmful factors

If heat generation from sensor wires is reduced, then thermal syphoning and fluid deterioration are minimized, but measurement accuracy decreases

Engineering Contradiction:
Improvethermal syphoning and fluid deteriorationVSAvoidflow rate measurement accuracy
Core Design Contradiction:
Object-generated harmful factorsVSMeasurement precision

Solution Approach 1:

By using periodic pulse signals with high frequency (1 kHz or higher) and short width (100 μs or less), the system achieves effective heat generation during each pulse for accurate measurement while the duty cycle limitation ensures that overall heat generation remains low enough to prevent thermal syphoning and fluid deterioration.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent introduces dynamic pulsing characteristics to the otherwise static heating process. The pulse signal dynamically switches between on and off states, creating time-varying heat generation that optimizes the balance between maintaining measurement accuracy during pulse periods and minimizing harmful thermal effects during off periods.

Inventive Principle:
Principle #15Dynamics

3Measurement precision

If pulse signal width is increased, then signal intensity is improved, but heat generation increases causing thermal syphoning

Engineering Contradiction:
Improvesignal intensityVSAvoidthermal syphoning
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent optimizes the pulse signal parameters by setting the pulse width to 100 μs or less and the repetition frequency to 1 kHz or higher. This parameter configuration achieves sufficient signal intensity for accurate measurement while keeping the duty cycle low enough to prevent excessive heat generation and thermal syphoning.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The high-frequency periodic pulsing allows the system to accumulate sufficient signal intensity over multiple cycles while the brief duration of each pulse and the repetition rate prevent excessive heat buildup that would cause thermal syphoning.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces heat generation from sensor wires while maintaining measurement accuracy, improving the signal-to-noise ratio and reducing issues like zero-point variation and thermal syphoning, enabling continuous and accurate flow rate monitoring.

Implementation Method 1

when the pair of sensor wires is made to generate heat by applying a predetermined electric voltage (or a predetermined electric current) thereto

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

heat generated from the sensor wires is removed (drawn) by a fluid which flows through the sensor tube

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

electrical resistance value of the sensor wire on the upstream side becomes lower than an electrical resistance value of the sensor wire on the downstream side

Methodology Applied
Scientific EffectElectrical resistance temperature dependence: Electrical Resistance

Data Source

PatentUS10508943B2Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
Publication Date: 2019.12.17 PROTERIAL LTD
  • US10508943B2 patent drawing
  • US10508943B2 patent drawing
  • US10508943B2 patent drawing

AI summary

By supplying a pulse signal to sensor wires to make the sensor wires generate heat, instead of applying DC electric voltage to the sensor wires, an amount of energy supplied to the sensor wires is decreased while maintaining a signal intensity supplied to the sensor wires, or the signal intensity supplied to the sensor wires is increased while maintaining the amount of energy supplied to the sensor wires. Thereby, a method for measuring a mass flow rate by a thermal type mass flow meter, which can reduce heat generation from the sensor wires while suppressing decrease in measurement accuracy, or can improve measurement accuracy while suppressing increase in heat generation from the sensor wires, is provided.