Flow Passage Unit Layout Using Through-Hole Vertical Connections
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Solution Overview
Problem
Conventional flow passage units for manufacturing processes, such as semiconductors and organic EL devices, require a large horizontal installation space due to the alignment of fluid devices on the upper surface of substrate blocks, making them less compact.
Innovation Solution
A flow passage unit design featuring a base plate with fluid devices positioned on both sides in the thickness direction, utilizing through holes and gaskets to connect flow passage holes orthogonally, allowing for compact configuration and easy attachment/detachment of devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If all fluid devices are aligned on the upper surface of the base plate, then the flow passage holes can be connected in order, but the horizontal installation space becomes large
Solution Approach 1:
The patent transitions from a two-dimensional horizontal arrangement of fluid devices to a three-dimensional configuration by placing fluid devices on both the upper and lower surfaces of the base plate. Through holes penetrate the base plate to connect flow passage holes between devices on opposite surfaces, enabling vertical connectivity that reduces horizontal space requirements while maintaining functional connectivity.
2Device complexity
If fluid devices are arranged horizontally along the upper surface, then flow passage holes can be connected sequentially, but the device becomes less compact
Solution Approach 1:
The invention utilizes the thickness direction (vertical dimension) of the base plate to arrange fluid devices, creating a compact three-dimensional configuration. Through holes provide vertical flow paths that connect devices on opposite surfaces, achieving compact volume while maintaining necessary flow passage connectivity.
3Adaptability or versatility
If fluid devices are detachably provided on the base plate, then individual attachment and detachment is enabled, but the sealing connection becomes more complex
Solution Approach 1:
The patent introduces gaskets as intermediary sealing components positioned between the base plate and fluid devices. These gaskets provide sealing functionality at detachable connections, enabling individual attachment and detachment of fluid devices while maintaining fluid-tight seals without requiring complex integrated sealing mechanisms.
Data Source
AI summary
A flow passage unit 1 includes a base plate 2 and a plurality of fluid devices 3 provided on the base plate 2. The plurality of fluid devices 3 include a first fluid device 31 having a first flow passage hole 31b, and a second fluid device 32 having a second flow passage hole 32b. The first fluid device 31 is disposed on an upper side of the base plate 2 and detachably provided on the base plate 2, and the second fluid device 32 is disposed on a lower side of the base plate 2 and detachably provided on the base plate 2. The base plate 2 has a first through hole 21 formed so as to penetrate the base plate 2 in a thickness direction of the base plate 2 to provide communication between the first flow passage hole 31b and the second flow passage hole 32b.