Supply Flow Path Cleaning Using Foreign Substance Feedback

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Solution Overview

Problem

Conventional methods for cleaning supply paths in substrate treatment systems require a large amount of cleaning solution and time, and rely on external detection of foreign substances, which is inefficient and inconvenient.

Innovation Solution

A method involving the use of a foreign substance detector to monitor the cleaning process, estimating a cleaning completion point based on the detection history, and adjusting the cleaning process accordingly to minimize the amount of cleaning solution used and time required.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional dummy dispensing is performed to clean the supply flow path, then foreign substances are removed from the flow path, but a large amount of cleaning solution and time are required

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidcleaning solution amount

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The system uses a foreign substance detector to provide real-time feedback on the cleanliness of the flow path during cleaning. The detector monitors foreign substances in the discharged cleaning solution, and the controller adjusts the cleaning process based on this feedback, allowing the system to stop cleaning when the flow path is sufficiently clean, thereby reducing cleaning solution consumption while maintaining effective cleaning

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system performs self-diagnosis and self-adjustment by automatically detecting foreign substances and controlling the cleaning process without external intervention. The controller autonomously determines when cleaning is complete based on detector feedback, eliminating the need for external detection and manual judgment

Inventive Principle:

Principle #25Self-service

2Measurement precision

If conventional dummy dispensing is performed with external detection, then foreign substances are detected, but the process becomes cumbersome and time-consuming

Engineering Contradiction:

Improveforeign substance detection accuracyVSAvoidcleaning time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The system merges the foreign substance detector and controller directly into the substrate treatment system, integrating detection and control functions. This eliminates the need for external detection equipment and manual processes, allowing real-time monitoring and automatic adjustment during cleaning, thereby reducing cleaning time while maintaining detection accuracy

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The detector continuously monitors foreign substances throughout the cleaning process, providing ongoing feedback rather than intermittent external checks. This continuous monitoring allows the system to maintain optimal cleaning efficiency and stop immediately when cleaning is complete, reducing total cleaning time

Inventive Principle:

Principle #20Continuity of useful action

3Reliability

If conventional dummy dispensing is performed repeatedly, then cleaning effectiveness is improved, but productivity decreases due to extended cleaning time

Engineering Contradiction:

Improveflow path cleanlinessVSAvoidsystem throughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The system uses real-time feedback from the foreign substance detector to determine when cleaning is complete, avoiding unnecessary repeated cleaning cycles. The controller automatically stops the cleaning process when the flow path achieves sufficient cleanliness, maintaining high cleaning effectiveness while minimizing cleaning time and maximizing productivity

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the amount of cleaning solution needed and shortens the cleaning time, while ensuring effective removal of foreign substances, thereby improving the convenience and efficiency of the cleaning process.

Implementation Method 1

a foreign substance detector configured to detect foreign substances in the cleaning solution supplied to the flow path

Methodology Applied

Scientific EffectForeign substance detection:

Data Source

PatentUS12461455B2Cleaning method, computer storage medium, and substrate treatment system

Publication Date: 2025.11.04 TOKYO ELECTRON LTD

AI summary

A method for cleaning a supply flow path connected to a discharger which discharges a treatment solution to a substrate, includes: (A) supplying a cleaning solution to the discharger via the supply flow path and discharging the cleaning solution from the discharger; and (B) estimating whether or not cleaning has been completed, based on a detection result by a foreign substance detector configured to detect foreign substances in the cleaning solution supplied to the supply flow path. The (B) includes: (C) estimating a cleaning completion point where the detection result by the foreign substance detector when a total discharge amount of the cleaning solution increases stabilizes, based on a history of the detection result by the foreign substance detector; and (D) estimating whether or not the cleaning has been completed, based on the estimated cleaning completion point.