Flow Path Contamination Detection for Timed Recovery Cleaning
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses struggle to determine the optimal conditions for performing recovery processing to remove foreign substances from flow paths effectively.
Innovation Solution
A condition determination support apparatus that calculates parameters based on accumulation data of light intensity to decide when to perform recovery processing, using a controller to analyze electrical signals from a foreign substance detection unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If recovery processing is performed frequently to remove foreign substances, then foreign substance removal effectiveness is improved, but processing time and productivity deteriorate
Solution Approach 1:
The system continuously monitors light intensity in the flow path and compares it against reference values to dynamically determine when recovery processing is needed. This feedback mechanism prevents unnecessary processing while ensuring timely intervention when foreign substances are detected, resolving the contradiction between maintaining cleanliness and preserving productivity
Solution Approach 2:
The system changes the parameter of light intensity measurement to detect foreign substances. By monitoring variations in light intensity and comparing against dynamically updated reference values, the system can accurately determine when recovery processing is necessary, avoiding both premature and delayed processing interventions
2Measurement precision
If light intensity monitoring is continuously performed to detect foreign substances, then detection precision is improved, but energy consumption increases
Solution Approach 1:
Instead of continuous monitoring, the system performs light intensity measurements periodically whenever processing liquid is supplied to the substrate. This periodic action maintains detection capability while significantly reducing energy consumption compared to continuous monitoring
Solution Approach 2:
The system uses the existing processing liquid supply process as the trigger for measurement, rather than requiring a separate continuous monitoring system. The foreign substance detection is performed using the normal operational cycles of the equipment, eliminating the need for additional energy-consuming continuous monitoring infrastructure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the determination of when to perform recovery processing, improving the efficiency and effectiveness of foreign substance removal from flow paths in substrate processing systems.
Implementation Method 1
optically detect foreign substances in a supply channel through which a fluid to be supplied to a substrate flows
Implementation Method 2
detect foreign substances in each of a plurality of supply channels and specify which channel of the channels is the cause of a foreign substance
Implementation Method 3
calculate parameters required to determine the conditions of whether to perform the recovery processing based on accumulation data acquired by accumulating an intensity of emitted light
Data Source
AI summary
A condition determination support apparatus supports determination of conditions of whether to perform a recovery processing of cleaning a flow path, through which a processing liquid flows within a substrate processing apparatus, to remove foreign substances from the flow path. The condition determination support apparatus includes a parameter calculator for calculating parameters required to determine the conditions of whether to perform the recovery processing based on accumulation data acquired by accumulating an intensity of emitted light at the time of radiating light to the flow path whenever the processing liquid is supplied to a substrate.