Flow Path Assembly With Elastic Sealing for Integrated Valve Response
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Solution Overview
Problem
In semiconductor manufacturing processes, there is a need for a fluid control device that is compact, integrated, and responsive, with reliable sealing of functional components like orifices and filters within the valve body to enhance gas supply control, especially as wafer sizes increase, requiring higher flow rates and shorter flow paths.
Innovation Solution
A flow path assembly comprising metallic members with a plate-like member and an elastic member to seal gaps between them, using a caulking portion to integrate and exert force for sealing, and a valve device with a diaphragm and valve seat assembly that incorporates this flow path assembly to control fluid flow rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If functional components such as orifices and filters are integrated into the valve body to shorten the flow path and improve responsiveness, then the responsiveness of gas supply control is improved, but reliable sealing of the space between flow path members and functional components for a long period of time becomes difficult to achieve
Solution Approach 1:
An elastic member in the form of a flexible ring is used to seal the gap between flow path members and the functional component (orifice plate or filter). The elastic member can elastically deform to accommodate dimensional variations and maintain reliable sealing contact, resolving the contradiction between integrated design for responsiveness and sealing reliability.
Solution Approach 2:
The elastic modulus and cross-sectional dimensions of the elastic member are carefully selected to provide appropriate sealing force. By changing the physical parameters of the elastic member, the sealing reliability is enhanced while maintaining the integrated structure that provides responsive gas supply control.
2Volume of moving object
If the fluid control device is made compact and integrated by installing multiple fluid devices on a base block, then the device size is reduced and installation space is minimized, but the complexity of integration and sealing increases
Solution Approach 1:
Multiple fluid control functions (flow path, functional component, and sealing) are merged into a single integrated assembly. The flow path members, functional components (orifices/filters), and elastic sealing members are combined into one compact unit, reducing overall device size while managing integration complexity through standardized design.
Solution Approach 2:
The elastic member serves multiple functions: sealing the gap between flow path members and the functional component, compensating for dimensional variations, and maintaining structural integrity. This multi-functionality reduces the need for additional separate sealing components, simplifying the overall integration.
3Quantity of substance
If wafer size is increased to accommodate larger processing objects, then the processing capacity is improved, but the supply flow rate requirement increases and the flow path must be shortened to maintain responsiveness
Solution Approach 1:
The flow path is segmented into compact sections with functional components (orifices, filters) integrated directly into the valve body. This segmentation allows the flow path to be shortened while maintaining adequate flow control capabilities for higher flow rates required by larger wafers.
Solution Approach 2:
The flow path assembly uses a three-dimensional integrated structure where flow path members and functional components are arranged in multiple dimensions within a compact volume. This allows sufficient flow path length for flow control while maintaining overall compactness to meet the shortened flow path requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides reliable long-term sealing and enhanced responsiveness in fluid control, ensuring accurate and efficient gas supply to semiconductor processing chambers, even with larger wafers, by effectively sealing gaps between flow path members and maintaining flow control precision.
Implementation Method 1
the elastic member being crushed between the first and second flow path members by receiving a force from the caulking portion, to seal a gap between the first and second flow path members
Data Source
AI summary
A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.