Heating Processing Liquid Flow Path to Prevent Crystallization

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Solution Overview

Problem

In conventional substrate liquid processing apparatuses, the temperature decrease of processing liquid in the flow path leads to crystallization when a room-temperature cleaning fluid is supplied, resulting in inadequate cleaning and potential blockage of the flow path due to crystal formation.

Innovation Solution

A substrate liquid processing apparatus with a controller that heats the processing liquid to a temperature higher than the crystallization point of the reaction between the processing liquid and the cleaning fluid, ensuring the heated processing liquid is supplied into the flow path, thereby preventing crystallization and ensuring effective cleaning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If room-temperature cleaning fluid is supplied into the flow path to clean the processing liquid, then cleaning effectiveness is improved, but crystallization occurs due to temperature decrease leading to flow path blockage

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidcrystallization and flow path blockage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The system performs preliminary heating of the processing liquid before cleaning operation. The controller activates the heater to maintain the processing liquid at a temperature higher than the crystallization point before introducing the cleaning fluid, preventing crystallization from occurring during the cleaning process

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system changes the temperature parameter of the processing liquid by heating it to a specific temperature range (higher than the crystallization point but not excessively high). This parameter modification allows the cleaning fluid to be supplied without causing crystallization, resolving the contradiction between cleaning effectiveness and preventing harmful crystallization

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If the processing liquid is heated to prevent crystallization, then crystallization is prevented, but energy consumption increases

Engineering Contradiction:

Improvecrystallization preventionVSAvoidheating energy consumption

Core Design Contradiction:

Object-affected harmful factorsVSUse of energy by moving object

Solution Approach 1:

The system optimizes the temperature parameter by heating the processing liquid to a specific range (higher than crystallization point but not excessively high). This controlled parameter change prevents crystallization while minimizing unnecessary energy consumption that would occur with excessive heating

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system uses the existing heater component that is already part of the processing liquid circulation system. By utilizing this existing heating capability, the system prevents crystallization without requiring additional energy-intensive equipment or processes

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents crystallization and ensures thorough cleaning of the processing liquid flow path, preventing particle attachment to substrates and flow path blockages, thus ensuring efficient substrate processing.

Implementation Method 1

a heater configured to heat the processing liquid; and a controller configured to control the cleaning fluid supply unit and the heater. The controller controls the heater to heat the processing liquid to a temperature higher than a temperature at which crystallization is caused by a reaction between the processing liquid and the cleaning fluid

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

a temperature higher than a temperature at which crystallization is caused by a reaction between the processing liquid and the cleaning fluid

Methodology Applied

Scientific EffectCrystallization: Crystallisation

Data Source

PatentUS11185896B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium having substrate liquid processing program stored thereon

Publication Date: 2021.11.30 TOKYO ELECTRON LTD

AI summary

A substrate liquid processing method comprises: providing a substrate liquid processing apparatus that includes a processing liquid flow path including a concentration sensor and a heater configured to heat the processing liquid; measuring a period of time for which the processing liquid is retained in the part of the processing liquid flow path including the concentration sensor; when determined that the period of time measured by the timer is longer than a predetermined period of time, 1) heating the processing liquid to a temperature higher than a crystallization temperature at which a reaction between the processing liquid and the cleaning fluid resulting in crystallization occurs, 2) supplying at least a part of the heated processing liquid into the part of the processing liquid flow path including the concentration sensor; and supplying the cleaning fluid into the part of the processing liquid flow path including the concentration sensor.