Flow Path Structure With Projections for Cleaner Gas Delivery

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Solution Overview

Problem

Existing flow path members in semiconductor manufacturing processes suffer from gas quality deterioration due to foreign matter contamination and inefficient gas flow, which affects the quality of treatment processes and equipment performance.

Innovation Solution

A flow path member design featuring a base with a first surface, first inflow and outflow ports, and interconnected first and second flow paths with projections and walls that retain foreign matter, ensuring smooth gas flow and maintaining gas quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional flow path member is used, then the structure is simple, but foreign matter contaminates the gas causing quality deterioration

Engineering Contradiction:

Improvegas qualityVSAvoidflow path structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The flow path is divided into multiple segments including a first flow path and a second flow path that are interconnected. This segmentation allows for strategic placement of projections at intersection points to trap foreign matter, thereby maintaining gas quality without requiring a completely redesigned complex structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Projections are placed in advance at the intersection of the first and second flow paths to intercept and retain foreign matter before it can contaminate the discharged gas. This preliminary action prevents contamination proactively rather than requiring post-processing filtration.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the flow path is simplified, then manufacturing is easier, but gas flow efficiency decreases

Engineering Contradiction:

Improvegas flow efficiencyVSAvoidflow path fabrication

Core Design Contradiction:

ProductivityVSEase of manufacture

Solution Approach 1:

The flow path structure implements local quality by creating projections only at specific intersection points where foreign matter accumulation is most likely to occur. This localized approach maintains manufacturing simplicity while effectively improving gas flow efficiency and preventing contamination at critical locations.

Inventive Principle:

Principle #3Local quality

3Reliability

If projections are added to retain foreign matter, then gas quality improves, but the flow path becomes more complex

Engineering Contradiction:

Improvegas qualityVSAvoidflow path structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

4Reliability

If a complex flow path design is used, then foreign matter retention is improved, but manufacturing difficulty increases

Engineering Contradiction:

Improveforeign matter retentionVSAvoidflow path fabrication

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

Inventive Principle:

Principle #3Local quality

Data Source

PatentUS12516416B2Flow path member

Publication Date: 2026.01.06 KYOCERA CORP

AI summary

A flow path member of the present disclosure includes: a base having a first surface, and further having a first inflow port and a first outflow port; and a flow path that connects to the first inflow port and the first outflow port in an inside of the base. The flow path includes a first flow path that goes along the first surface and a second flow path that intersects the first flow path. The base includes a first projection in the first flow path, and a surface of the first projection is continuous with a wall surface of the second flow path.