Flow Rate Adjusting Device With Segmented Annular Channels
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional flow rate adjusting devices for semiconductor manufacturing experience fluid accumulation issues, leading to failures due to linear fluid flow and subsequent accumulation in specific areas, which can cause degradation of the housing.
Innovation Solution
A flow rate adjusting device with a diaphragm portion and annular wall structure that guides fluid from the valve body portion to an outflow hole, preventing accumulation by circulating the fluid through an outside flow channel and utilizing a blocking wall to direct the fluid to the outflow hole, ensuring uniform pressure distribution and preventing fluid accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the second space is formed to surround the valve body, then the fluid can flow from the first space into the second space, but the fluid accumulates in specific areas of the second space causing failure
Solution Approach 1:
The second space is segmented into an inside flow channel surrounding the valve body and an outside flow channel outside the inside flow channel, with a communication flow channel connecting them. This segmentation prevents fluid accumulation by creating controlled flow paths.
Solution Approach 2:
The flow path is extended from a simple linear path to a three-dimensional circulation path by adding the outside flow channel that surrounds the inside flow channel, allowing fluid to circulate around the axis line instead of accumulating.
2Device complexity
If the fluid flows linearly toward the exit port from the valve body, then the flow path is simple, but the fluid accumulates in areas not along the linear path
Solution Approach 1:
The flow channel is segmented into inflow-side and outflow-side flow channels, with the outflow-side channel further divided into inside and outside flow channels. This segmentation creates a circulation path that prevents fluid accumulation while maintaining structural organization.
Solution Approach 2:
The inside flow channel is nested within the outside flow channel, forming a concentric arrangement that maximizes space utilization while ensuring complete fluid circulation around the valve body.
3Reliability
If the blocking wall is added to prevent fluid from flowing around the outside flow channel, then fluid accumulation is prevented, but the device structure becomes more complex
Solution Approach 1:
The harmful possibility of fluid flowing around the outside flow channel and accumulating is extracted and blocked by the blocking wall, which is strategically placed to eliminate the accumulation path while maintaining the beneficial circulation path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively prevents fluid accumulation and associated failures by guiding all fluid to the outflow hole, maintaining uniform pressure distribution and ensuring stable fluid circulation, thus enhancing the reliability of the flow rate adjustment mechanism.
Implementation Method 1
a compression chamber is pressurized to depress a diaphragm so as to allow a valve body to be spaced apart from a valve seat
Implementation Method 2
the fluid guided to the outside flow channel flows into the location, which is adjacent to the blocking wall and is isolated from the outflow hole by the blocking wall, circulates along a direction apart from the blocking wall, and finally reaches the outflow hole
Implementation Method 3
a blocking wall that is disposed in the outside flow channel and blocks the fluid having reached the outflow hole from flowing around the outside flow channel
Data Source
AI summary
Provided is a flow rate adjusting device in which a body portion having a valve hole includes: an annular wall portion that partitions a downstream-side fluid chamber into an inside flow channel annularly formed around a valve body portion and an outside flow channel annularly formed at an outside of the inside flow channel; an outflow hole that guides the fluid circulating in the outside flow channel to an outflow-side flow channel; and a blocking wall that blocks the fluid having reached the outflow hole from flowing around the outside flow channel. The annular wall portion includes a communication flow channel that guides the fluid from the inside flow channel to the outside flow channel. The communication flow channel guides the fluid to a location that is adjacent to the blocking wall and is isolated from the outflow hole by the blocking wall.