Flow Rate Amplification Nozzle for Polysilicon Reactor Gas Circulation
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Solution Overview
Problem
Conventional reactors for manufacturing polycrystalline silicon rods using the Siemens method face issues with non-uniform gas circulation and reduced jetting efficiency, leading to surface unevenness, diameter inconsistencies, and increased impurity contamination due to insufficient gas flow rates and force.
Innovation Solution
The implementation of flow rate amplification nozzles that mix silicon deposition raw material gas with the reactor atmosphere, enhancing the gas flow rate and jetting force by utilizing a Venturi effect and Bernoulli's principle, ensuring better circulation and uniformity within the reactor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a straight barrel pipe type gas supply nozzle is used to supply silicon deposition raw material gas, then the nozzle structure is simple, but the gas flow rate decreases considerably before reaching the upper wall and raw material gas utilization efficiency becomes inferior
Solution Approach 1:
The nozzle structure is changed from a straight barrel pipe to a curved nozzle body that guides the gas flow dynamically along its length. The curved geometry allows the gas flow to adapt to the nozzle shape, maintaining higher flow rates and improving utilization efficiency while adding moderate structural complexity.
Solution Approach 2:
The nozzle design incorporates a curved three-dimensional path instead of a straight linear structure. This dimensional change allows the gas flow to traverse a more efficient path, maintaining higher velocities and improving gas utilization before reaching the upper wall of the reaction chamber.
2Productivity
If the gas flow rate is increased to improve circulation, then raw material gas utilization efficiency improves, but surface unevenness and diameter non-uniformity occur in the polycrystalline silicon rod
Solution Approach 1:
The curved nozzle structure creates localized flow patterns that distribute gas more uniformly across the reaction chamber. The curved geometry focuses the gas flow in specific regions, improving local gas utilization efficiency while maintaining overall rod surface uniformity through controlled flow distribution.
3Ease of operation
If a side wall jetting port is added to form a hooking concave portion, then the hanging tool can be conveyed, but the jetting force of the raw material gas is reduced
Solution Approach 1:
The nozzle function is segmented into two parts: the curved nozzle body that maintains high jetting force for gas delivery, and a separate hooking concave portion formed by controlled gas flow that provides conveyance functionality. This segmentation allows each function to be optimized independently.
Solution Approach 2:
The curved nozzle structure acts as an intermediary that guides and focuses the gas flow to create the hooking concave portion while maintaining the primary jetting function. The curved geometry serves as a mediator between the gas supply and the two functional requirements (jetting and hook formation).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves the uniformity of polycrystalline silicon rod manufacturing by increasing gas flow rates and jetting force, reducing surface irregularities and impurity contamination, while enhancing the efficiency of raw material utilization and power intensity.
Implementation Method 1
flow rate amplification nozzles that mix silicon deposition raw material gas with the reactor atmosphere, enhancing the gas flow rate and jetting force by utilizing a Venturi effect and Bernoulli's principle
Implementation Method 2
flow rate amplification nozzles that mix silicon depositionraw material gas with the reactor atmosphere, enhancing the gas flow rate and jetting force by utilizing a Venturi effect and Bernoulli's principle
Implementation Method 3
the silicon core wires are heated to a silicon deposition temperature by energization, and in this state, a silicon deposition raw material gas composed of a silane compound such as trichlorosilane (SiHCl3) and monosilane (SiH4) and a reducing gas is supplied into an reaction chamber to deposit silicon on the silicon core wires by a chemical vapor deposition method
Data Source
Figure 1(a)~1(b)
Figure 2(a)~2(b)
Figure 3(a)~3(b)
AI summary
[Problem] To develop a method for manufacturing a polycrystalline silicon rod using the Siemens process, wherein the jetting rate of a silicon deposition raw material gas from a gas supply nozzle is more greatly improved, thereby strengthening the force of the gas flow and achieving superior raw material gas circulation in an upper section and a lower section within a bell jar. [Solution] In a reactor for manufacturing a polycrystalline silicon rod, the polycrystalline silicon rod is manufactured by using, as at least one gas supply nozzle, a flow rate amplification nozzle provided with a function of amplifying the flow rate of the silicon deposition raw material gas supplied to the nozzle and jetting the gas.