Flow Rate Control Apparatus Pressure Sensor Valve Leak Detection
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Solution Overview
Problem
In semiconductor and chemical facilities, thermal type mass flow rate control apparatuses make it difficult to detect sheet leaks in valves without removing them from the pipes, making regular checks troublesome and time-consuming.
Innovation Solution
A method using a flow rate control apparatus with a pressure sensor, flow rate/pressure display mechanism, and self-diagnosis mechanism to detect valve abnormalities, including sheet leaks, without removing the valves, by analyzing pressure drop characteristics and computing leaked volumes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thermal type mass flow rate control apparatus is used, then flow rate control is achieved, but sheet leak detection in valves requires removal from pipes making inspection troublesome and time-consuming
Solution Approach 1:
A pressure sensor is introduced as an intermediary device to detect pressure changes in the fluid supply line. The pressure sensor serves as a mediator between the valve and the detection system, enabling sheet leak detection without direct access to the valve internals or removal from the pipe. By monitoring pressure variations caused by sheet leaks, the system achieves reliable detection while maintaining operational convenience.
2Measurement precision
If valves are removed from pipes for sheet leak checking, then accurate detection is possible, but the inspection process becomes troublesome and time-consuming
Solution Approach 1:
The mechanical approach of removing valves for physical inspection is replaced with a pressure-based detection system. The pressure sensor monitors pressure changes in the fluid supply line that occur when sheet leaks are present, substituting the need for mechanical disassembly and manual inspection. This substitution maintains detection accuracy while dramatically reducing inspection time and operational disruption.
3Reliability
If a pressure sensor is added to detect sheet leaks, then valve abnormality detection capability is improved, but device complexity increases
Solution Approach 1:
The pressure sensor is designed to serve multiple functions within the fluid supply line system. Beyond sheet leak detection, it can monitor general pressure conditions, detect blockages, and provide diagnostic information about system health. This multi-functionality justifies the addition of the pressure sensor by making it a versatile component that addresses multiple potential issues rather than just adding complexity for a single detection purpose.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and accurate detection of valve abnormalities and sheet leaks, specifying the cause of issues and computing leakage volumes quickly, reducing the need for manual removal and improving maintenance efficiency.
Implementation Method 1
a pressure sensor to detect fluid pressure on the upstream side and/or the downstream side from a throttle mechanism
Implementation Method 2
by analyzing pressure drop characteristics and computing leaked volumes
Data Source
AI summary
A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.