Flow Rate Control Device Response Lag Adjustment
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Solution Overview
Problem
High-performance flow rate control devices in semiconductor manufacturing introduce response lags that deviate from conventional settings, leading to non-conforming semiconductor products, requiring extensive trial and error to adjust recipes and causing inefficiencies.
Innovation Solution
A flow rate control device with feedback control and a response lag input section allows operators to set and generate response lags, enabling equivalent responsiveness to existing devices, allowing for easy replacement and adjustment of flow rate control apparatuses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a high-performance flow rate control device with superior responsiveness is introduced, then the flow rate control precision is improved, but the actual flow rate deviates from the conventional recipe settings causing product specification non-conformance
Solution Approach 1:
The invention changes the control parameters by introducing a response lag component that adjusts the target flow rate based on the difference between actual and target values. This parameter transformation allows the high-performance device to operate in a manner compatible with conventional recipes, maintaining product specification conformance while utilizing superior hardware responsiveness.
Solution Approach 2:
The invention introduces an intermediary control mechanism (response lag generation section) that mediates between the high-performance flow rate control device and the conventional recipe settings. This intermediary transforms the direct target flow rate commands into adjusted commands that account for the device's superior responsiveness, ensuring compatibility with existing processes.
2Speed
If a high-performance flow rate control device is introduced, then the responsiveness is improved, but extensive trial and error is required to adjust recipes
Solution Approach 1:
The invention enables the flow rate control device to self-adjust by automatically generating response lags based on the difference between actual and target flow rates. This self-service capability eliminates the need for extensive manual trial and error adjustments, allowing the device to adapt to the process requirements autonomously while maintaining high responsiveness.
Solution Approach 2:
The invention implements a feedback mechanism where the actual flow rate is continuously monitored and compared with the target flow rate. The response lag generation section uses this feedback to dynamically adjust the target flow rate commands, enabling automatic adaptation without requiring extensive manual trial and error, thus reducing recipe adjustment time while maintaining fast responsiveness.
3Speed
If the flow rate control device is replaced with a new type of apparatus, then superior responsiveness is achieved, but massive time and effort are required for operator correction of recipes
Solution Approach 1:
The invention enables the new flow rate control device to self-correct by automatically generating response lags that account for the differences between its superior responsiveness and conventional recipe settings. This eliminates the need for operators to perform massive trial and error corrections, making the replacement process straightforward while maintaining high responsiveness.
Solution Approach 2:
The invention uses feedback from the actual flow rate measurements to automatically adjust target flow rate commands through response lag generation. This automated feedback mechanism handles the adaptation to new apparatus characteristics, freeing operators from extensive manual recipe correction efforts while utilizing the full capability of the new high-performance device.
Data Source
AI summary
An operator is able to easily perform down-tuning while still achieving superior responsiveness and, in some cases, obtain an equivalent responsiveness as that obtained from the flow rate control device currently being used. In a flow rate control device that performs feedback control of a fluid control valve such that a measured flow rate closely approximates a target flow rate, there are provided a response lag input section that inputs a response lag set value, which is a value showing a response lag that an operator wishes to set, and a response lag generating section that generates response lags used in the feedback control in accordance with the response lag set values.