Flow Rate Controller Inspection via Intermittent Gas Pressure Rise
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Solution Overview
Problem
In substrate processing for electronic devices, there is a need to accurately inspect flow rate controllers to recognize delay times in intermittent gas supply, as these delays affect the processing of workpieces and can lead to errors in gas delivery.
Innovation Solution
A method involving continuous and intermittent gas output from the flow rate controller, where pressure rise characteristics are measured to calculate required times and estimate delay times, allowing for the recognition and adjustment of gas supply parameters to minimize errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the build-up method is used to inspect the flow rate controller, then the output flow rate can be measured, but the delay time in intermittent gas supply cannot be recognized
Solution Approach 1:
The patent applies periodic action by using intermittent gas supply instead of continuous gas supply during inspection. The gas supply is performed in repeated cycles with alternating supply and stop periods, which generates periodic pressure changes in the chamber. This periodic action allows the system to capture both the flow rate information (through pressure rise during supply periods) and the delay time information (through the timing characteristics of the pressure response to each supply cycle), thereby resolving the contradiction between measuring flow rate and detecting delay time.
2Stability of the object's composition
If continuous gas output is used for inspection, then the flow rate can be maintained, but the delay time characteristic of intermittent supply cannot be evaluated
Solution Approach 1:
The patent applies dynamics by transitioning from static continuous gas supply to dynamic intermittent gas supply. The gas supply conditions are made variable through repeated cycles of supply and stop, allowing the system to evaluate both the stability of flow rate (when supplied) and the dynamic response characteristics (delay time) of the flow rate controller. This dynamic approach enables comprehensive evaluation of both continuous supply performance and intermittent supply adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the accurate recognition of delay times and adjustments to gas supply parameters, thereby improving the accuracy of workpiece processing by reducing errors in gas delivery.
Implementation Method 1
a measured value of the pressure in the internal space is acquired by a pressure sensor
Implementation Method 2
an exhaust device configured to depressurize the chamber
Data Source
AI summary
A method according to an aspect includes outputting gas continuously from a flow rate controller, closing a valve, obtaining a first pressure rise characteristic, outputting the gas intermittently from the flow rate controller, closing the valve, obtaining a second pressure rise characteristic, obtaining a third pressure rise characteristic, obtaining a fourth pressure rise characteristic, obtaining a first required time required from the third pressure rise characteristic, obtaining a second required time from the fourth pressure rise characteristic, obtaining an estimated time until a predetermined pressure is reached, in a case where the intermittent output of the gas is performed assuming that there is no delay time, and obtaining a parameter representing a difference between the estimated time and the second required time.