Flow Rate Measurement Mechanism Using Flexible Diaphragm Displacement

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Solution Overview

Problem

Conventional flow rate measurement mechanisms in fluid control apparatuses require two pressure sensors, leading to increased costs and reduced accuracy due to limited surface area for pressure reception and deformation.

Innovation Solution

A flow rate measurement mechanism that employs a fluid resistance element, a flexible component that deforms with flow rate changes, a displacement sensor to measure deformation, and a flow rate calculation unit, eliminating the need for upstream and downstream pressure sensors and enhancing surface area for pressure reception.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If two pressure sensors (upstream-side and downstream-side) are provided to measure flow rate, then flow rate measurement can be achieved, but costs increase due to the requirement for high-accuracy sensors

Engineering Contradiction:
Improveflow rate measurement accuracyVSAvoidnumber of pressure sensors
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention extracts the flow rate measurement function from the pressure sensor system by using a single pressure sensor combined with a flexible component (diaphragm) that mechanically transforms flow-induced pressure into measurable displacement. This eliminates the need for dual pressure sensors while maintaining measurement capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The flexible component (diaphragm) acts as an intermediary between the fluid flow and the pressure sensor. It receives pressure from the fluid flowing through the resistance element and converts it into displacement that can be measured by a single pressure sensor, thereby mediating the measurement process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If an aperture is formed in a diaphragm on a rectilinear flow path to measure flow rate, then structure is simplified, but the surface area receiving pressure from fluid is limited reducing measurement accuracy

Engineering Contradiction:
Improveflow path structureVSAvoidflow rate measurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The invention changes the flow path configuration from rectilinear to a structure where fluid flows along the resistance element. This dimensional change allows the flexible component to receive pressure over a larger surface area, expanding the effective measurement area beyond what a simple aperture configuration can provide.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The flexible component serves multiple functions: it acts as both a flow path boundary and a pressure-receiving element. By making the flexible component itself the pressure-receiving surface rather than relying solely on an aperture, the system achieves both structural simplicity and enhanced measurement capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces costs by eliminating the need for dual pressure sensors and enhances measurement accuracy by increasing the surface area for pressure reception and deformation, allowing for highly accurate flow rate measurements.

Implementation Method 1

a fluid resistance element provided on a flow path along which flows a fluid, and in which a resistance flow path is formed

Methodology Applied
Scientific EffectPressure drop: Pressure Drop

Implementation Method 2

a fluid receiving portion provided on the flow path and hit by the fluid flowing from the upstream side of the fluid resistance element so as to cause the fluid to flow to a side

Methodology Applied
Scientific EffectImpact force: Impact Force

Implementation Method 3

a flexible component that supports the fluid resistance element and deforms in accordance with a flow rate of the fluid

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS20250164298A1Flow rate measurement mechanism and fluid control apparatus
Publication Date: 2025.05.22 HORIBA STEC CO LTD
  • US20250164298A1 patent drawing
  • US20250164298A1 patent drawing
  • US20250164298A1 patent drawing

AI summary

A fluid resistance element is disposed on a flow path along which flows a fluid, and in which a resistance flow path is formed. A fluid receiving portion is provided on the flow path and is hit by the fluid flowing from upstream of the fluid resistance element so as to cause the fluid to flow to a side. Flexible components support the fluid resistance element and deform in accordance with a flow rate of the fluid. A displacement sensor measures a displacement of the flexible components, and a flow rate calculation unit calculates a flow rate of the fluid based on the displacement. The fluid that is made to flow to the side by the fluid receiving portion flows along the resistance flow path of the fluid resistance element.